Taiwan Semiconductor Manufacturing Comp. Ltd.

Jun-Sheng Yeh

Ren-Chyi You

An-Wei Peng

Chang-Zong Liu

A system includes a dispatching system and at least one processor. The dispatching system is configured to provide dispatching preferences indicating that tools feedback preferences thereof for at least one lot. The processor is coupled to the dispatching system and at least one memory. Computer program code encoded in the memory is executed by the processor to cause the system to process the lot using at least one of the tools with utilization of a tool-lot relationship that is generated based on the dispatching preferences. A non-transitory computer readable medium and a method are also disclosed herein.

Method and system for lot-tool assignment

A method is disclosed and includes generating a tool-lot relationship based on at least one process constraint and a dispatching rule which includes dispatching preferences for operating at least one lot; assigning the at least one lot to at least one tool by using the tool-lot relationship; and the at least one tool, assigned using the tool-lot relationship, processing the at least one lot by utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.

A method is disclosed and includes determining whether there is any WIP information with one or more process constraints in a process constraint database that is coupled with a manufacturing execution system; determining whether there is a dispatching rule in the dispatching rule database that is coupled with a dispatching system; generating a tool-lot relationship based on at least one of the process constraints and the dispatching rule; utilizing the tool-lot relationship to assign one or more lots to one or more tools respectively.

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Taipei, Taiwan

Jun-Sheng Yeh