Lasertec Gmbh

Jun Sakuma

Akihiro Ando

Haruhiko Kusunose

Kiwamu Takehisa

Ryotaro Mori

A decrease of an output of a wavelength converted light converted by a nonlinear optical crystal is suppressed. A light source apparatus according to the present disclosure includes a fundamental wave light source configured to generate a fundamental wave which is a continuous oscillation laser beam, an external cavity including a plurality of optical mirrors, a nonlinear optical crystal installed inside the external cavity and configured to generate a light with a wavelength shorter than that of the fundamental wave. The light source apparatus includes at least one phase modulator disposed between the fundamental wave light source and the external cavity and configured to modulate the fundamental wave by a modulation frequency of an integer multiple of a resonance frequency interval of the external cavity.

Light source apparatus and inspection apparatus

A light-source apparatus, an inspection apparatus, and an adjustment method capable of facilitating the adjustment of the temperature of a BBO crystal are provided. A light-source apparatus according to the present disclosure includes a first light source configured to generate visible light, a first external resonator including a plurality of optical mirrors, a BBO crystal disposed in the first external resonator, capable of generating UV light in a wavelength range of 233 nm to 236 nm, the UV light being a second harmonic of the visible light, a one- or two-dimensional semiconductor sensor disposed near a far-field image plane formed through an optical element provided on an optical path of the UV light, and a calculation unit configured to calculate a representative position of a light intensity distribution detected by the semiconductor sensor.

Light-source apparatus, inspection apparatus, and adjustment method

A wavelength conversion apparatus and a wavelength conversion method that can stably output wavelength converted light for a long time are provided. A wavelength conversion apparatusaccording to an aspect of the present disclosure includes a casing, a wavelength conversion elementdisposed inside the casingand configured to convert a wavelength of incident light and output light with the converted wavelength, a first portthat introduces a first gas containing 99.9% or more of a nitrogen gas inside the casing, and a second portthat introduces a second gas containing 1% or more of an oxygen gas.

Wavelength conversion apparatus and wavelength conversion method

A laser light source device having a simple configuration and an inspection device are provided. A laser light source deviceaccording to an exemplary embodiment in accordance with the present invention has a repetition frequency of 1 MHz or higher, and includes fundamental wave generation meansfor oscillating laser light including a fundamental wave with its center wavelength being included in one of first to fourth wavelength bands, and meansfor generating a sixth harmonic of pulsed laser light extracted from the fundamental wave generation means. The first wavelength band is 1064.326 nm to 1064.511 nm. The second wavelength band is 1064.757 nm to 1064.852 nm. The third wavelength band is 1063.805 nm to 1063.878 nm. Further, the fourth wavelength band is 1063.962 nm to 1064.031 nm.

Laser light source device and inspection device

Provided are a light source apparatus and an inspection apparatus that can stably output a wavelength converted light beam. A light source apparatus includes a laser light source that generates a first fundamental light beam, at least one nonlinear optical crystal that generates a wavelength converted light beam using the fundamental light beam or a harmonic laser beam of the fundamental light beam as an incident light beam, a detector that detects the wavelength converted light beam, an acousto-optic modulator that is disposed in an optical path of the incident light beam in such a way that a zero-order light beam enters the nonlinear optical crystal, and a controller that controls an output intensity of the wavelength converted light beam according to a detection signal from the detector.

The present invention provides a radiation source apparatus which can generate a DUV radiation beam having a wavelength of 193.4 nm efficiently. The radiation source apparatus according to the invention has first wavelength conversion means arranged to receive a first laser beam of a first fundamental wavelength and to generate a fourth-harmonic wavelength of the first fundamental wavelength, second wavelength conversion means arranged to receive the beam of the fourth-harmonic wavelength of the first fundamental wavelength (266 nm) and a second laser beam of a second fundamental wavelength and to sum-frequency mix the fourth-harmonic with the second fundamental wavelength radiation to generate a beam of second DUV radiation having a wavelength between approximately 232 nm and 237 nm, and third wavelength conversion means arranged to receive the beam of second DUV radiation and the third laser beam of a third fundamental wavelength and to sum-frequency mix the second DUV radiation with the third fundamental wavelength radiation to generate third DUV radiation having a wavelength between approximately 192.5 nm and 194.5 nm.

Radiation source apparatus and DUV beam generation method

The invention is directed to the provision of a wavelength conversion-type ultraviolet light source apparatus that can obtain a stable output. A light source apparatus according to one mode of the invention includes: a laser light sourcewhich produces fundamental light L; at least one nonlinear optical crystalwhich takes the fundamental light Lor a harmonic thereof as incident light and outputs wavelength-converted light L; and polarization adjusting meanswhich is placed in an optical path of the incident light and causes an output of the wavelength-converted light Lto change by changing its refractive index for a polarized component of the incident light. The polarization adjusting meanschanges the amount of change of the refractive index in accordance with an electrical signal output from a photodetector

Growing community of inventors

Kanagawa, Japan

Jun Sakuma