Daifuku Co., Ltd.

Jun Pil Yun

Sung Goo Choi

Jung Young Lee

Ho Geun Lee

Jun Han Lee

Jae Won Jang

Dong Gyu Yoo

Jae Hyun Lee

Yong Hwan Gwon

Ju Sik Jo

Provided is an apparatus of an inhalation type for stocking a wafer at a ceiling and an inhaling type wafer stocking system having the same including a stocking system having a shelf that is fixed to a ceiling and supports a container in which a wafer is present; and an inhalation assembly that is installed in the stocking system so as to correspond to the shelf and is configured so as to inhale gas that leaks from the container.

Apparatus of inhalation type for stocking wafer at ceiling and inhaling type wafer stocking system having the same

The invention provides an apparatus for stocking and purging a wafer at a ceiling. The apparatus includes: a rail that is formed so as to be installed on a ceiling to guide a vehicle; a stock system that is formed so as to be installed on the ceiling and is formed so as to receive a container, which contains wafers, from the vehicle and stock the container; and a purge assembly that is installed so as to communicate with the container through the stock system and is formed so as to purge the wafers, which are contained in the container, with gas.

Ceiling storage device capable of wafer purging

Growing community of inventors

Asan-si, South Korea

Jun Pil Yun