Hitachi Displays, Ltd.

Hitachi, Ltd.

Panasonic Liquid Crystal Display Co., Ltd.

Jun Ooida

Yoshiaki Nakayoshi

Ken Ohara

Hiroshi Saito

Takahiro Miyazaki

Tsunenori Yamamoto

Takanori Nakayama

Yasuko Gotoh

Kaori Miyazaki

Ryuuta Watanabe

Yoshinori Muramatsu

Seiji Ishikawa

The manufacturing method of a liquid crystal display device includes a step of forming the scanning signal lines including a step in which a photosensitive material film is exposed using an exposure device having a spatial light modulating element which generates an exposure pattern by a numerical control based on drawing data prepared based on the layout data. The drawing data is prepared by correction such that a shape of a portion of the scanning signal line in the layout data which is overlapped to a source electrode has an area corresponding to the distribution of a film thickness of an insulation layer interposed between the scanning signal line and the source electrode.

Liquid crystal display device and manufacturing method thereof

A display device which can reduce easily the brightness unevenness produced by the insufficient writing of TFT, wherein, the display device having: a display panel which, over a surface of an insulating substrate, includes plural scanning signal lines; plural picture signal lines; plural TFTs; plural pixel electrodes coupled to sources of the TFTs; and a counter electrode, wherein the pixel and counter electrodes are arranged over the same surface of an insulating layer overlying the surface of the insulating substrate, and when a gate insulating film provided at one TFT among the TFTs is thinner than a gate insulating film provided at another TFT among the TFTs, a gap between a pixel electrode coupled to the source of the one TFT and the counter electrode is set to be wider than a gap between a pixel electrode coupled to the source of the another TFT and the counter electrode.

Display device wherein a value of a channel width divided by a channel length of one TFT is greater than another TFT, and a gap between a pixel electrode and a counter electrode is wider for the one TFT than the another TFT

An exposure method that suppresses distribution of pattern shapes at the time of exposure. In a manufacturing method for a display unit, a layer forming a reference for pattern arrangement is determined among layers formed on a panel. An arrangement of a pattern in a layer above the reference layer is determined using a value obtained from distribution of the pattern arrangement in the reference layer.

Method of manufacturing display unit

A display device comprising a plurality of scan signal lines; a plurality of picture signal lines three-dimensionally intersecting the plurality of scan signal lines; and numerous TFT elements arranged in a matrix; and having a display panel in which each of the TFT elements has a gate connected to one of the plurality of scan signal lines, and a drain or source connected to one of the plurality of picture signal lines; wherein the TFT elements respectively differ in terms of channel width, channel length, or both, depending on a distance from a signal input terminal of the scan signal line to which the gate is connected and a distance from a signal input terminal of the picture signal line to which one of the drain and the source is connected.

Display device

Display device wherein a gate insulating film provided at one TFT is thinner than a gate insulating film provided at another TFT, and a gap between a pixel electrode and a counter electrode is wider for the one TFT than the another TFT

The present invention provides a liquid crystal display device which can easily prevent the generation of longitudinal smear. The display device includes a display panel having a plurality of scanning signal lines, a plurality of video signal lines, a plurality of thin film transistors and a plurality of pixel electrodes arranged in a matrix array. In a state that a gap between two neighboring video signal lines with one pixel electrode out of the plurality of pixel electrodes sandwiched therebetween in a region where one pixel electrode is arranged is larger than a gap between two neighboring video signal lines with another pixel electrode different from one pixel electrode sandwiched therebetween in a region where another electrode is arranged, a size of one pixel electrode is set larger than a size of another pixel electrode.

Display device and manufacturing method thereof

A display panel manufacturing method in which forming a thin film on a substrate and etching the thin film are repeated a plurality of times to form on the substrate a plurality of scanning signal lines, a plurality of video signal lines that three-dimensionally intersects the plurality of scanning signal lines with an insulating layer between them, and TFT elements and pixel electrodes each disposed in a pixel area enclosed with two adjacent scanning signal lines and two adjacent video signal lines. The method also includes: exposing a resist film using exposure dimensions numerically expressed based on design patterns prepared in advance; etching the thin film using etching resists formed by developing the exposed resist film so as to form thin-film patterns; and correcting the design patterns according to the complete dimensions of the formed thin-film patterns.

Manufacturing method of display device and exposure system for that

The present invention provides a technique which can make an image quality on a screen of a TFT liquid crystal display device uniform. A liquid crystal display device includes a TFT substrate on which TFT circuits are arranged in an array, a counter substrate which is arranged to face a surface of the TFT substrate on which the TFTs are formed, and a liquid crystal material which is filled between the TFT substrate and the counter substrate, wherein in the TFT substrate, assuming a film thickness and a width of a conductive film of the gate electrode lines in a first region thereof as GLDand GLWrespectively, and a film thickness and a width of a conductive film of the gate electrode lines in a second region thereof which differs from the first region as GLDand GLWrespectively, when the relationship GLD&#x3c;GLDis established, the relationship GLW&#x3e;GLWis established.

Liquid crystal display device and display device

A liquid crystal display device comprises a pair of substrates which are arranged to face each other in an opposed manner while sandwiching liquid crystal therebetween, pixel regions which are formed on a liquid-crystal-side surface of one substrate out of the pair of substrates, and thin film transistors which are formed on respective pixel regions, wherein each thin film transistor includes a gate electrode connected to a gate signal line, a semiconductor layer laminated to the gate electrode by way of an insulation film, a drain electrode formed on the semiconductor layer and connected to a drain signal line, and a source electrode connected to a pixel electrode, and the semiconductor layer is formed in a periodically irregular shape in a zone having a width substantially larger than a width of the source electrode on a side thereof from which at least the source electrode is pulled out.

Growing community of inventors

Mobara, Japan

Jun Ooida