Asahi Kogaku Kogyo Kabushiki Kaisha

Asahi Kogaku Kogyo K.k.

Jun Nonaka

Akira Morimoto

Satoru Tachihara

Yuji Matsui

Takashi Okuyama

Masatoshi Iwama

Yasushi Ikeda

Hideyuki Morita

Tamihiro Miyoshi

Akira Ohwaki

Hidetaka Yamaguchi

Toshitaka Yoshimura

Michio Ohshima

Mitsuo Kakimoto

Hiroaki Andoh

Satoru Kobayashi

Shuichi Shimizu

Takashi Iizuka

By Michiko Matsui, Legal Representative

Yuji Matsui, Deceased

A laser drawing apparatus is provided including a splitting means for splitting laser light emitted from a laser source into at least two groups of drawing beams, the beams of each group being aligned in a common plane; a scanning means for scanning a drawing surface with said at least two groups of drawing beams in a main scanning direction; a first adjusting means for rotating the common plane, in which one of the at least two bundles of drawing beams are aligned, about an axis extending parallel to the drawing beams; a second adjusting means for moving at least one of the at least two groups of drawing beams in said main scanning direction of the scanning means; and, a third adjusting means for moving at least one of the at least two groups of drawing beams in a sub-scanning direction perpendicular to the main scanning direction.

Laser drawing apparatus and method for adjusting the same

A laser drawing apparatus is provided including, a first beam splitting element for splitting laser light emitted from a laser source into a plurality of beams, a second beam splitting element for splitting the beams split by the first beam splitting element into a plurality of groups of drawing beams, optical modulators which provide separate ON/OFF drawing data to the respective split drawing beams split by the second splitting element, a beam combining element for combining the split drawing beams to which the ON/OFF drawing data has been provided, and a beam scanning element for scanning a drawing surface on which an image is to be formed with the combined drawing beams.

Laser drawing apparatus featuring a beam separator supported by an

A table carrier system of the present invention has a movable table for carrying an object. A displacement detecting system for detecting the displacement of the table by using an interference of light, and a table driving system positions the table according to the detected displacement. If a scaling amount is set in order to change a predetermined displacement range of the table, a reference value of wavelength set in the detecting system is changed in compliance with the scaling amount.

Movement measuring interferometer and driving system

A drawing surface adjusting mechanism suitable for use with a large scanning pattern drawing apparatus in which a scanning optical system scans drawing rays of light along scanning lines on a workpiece on a drawing board. A plurality of light-emitting units project rays of light in a wavelength region outside a sensitivity range of the workpiece onto a drawing surface of the workpiece in such a way that the rays substantially converge at more than one point along a scanning line of the drawing rays of light, preferably at center and end points along the scanning line. A plurality of condenser lenses are provided for focusing beams of light from the plural light-emitting units after the beams have been reflected by the drawing surface. A plurality of light-detecting elements are disposed at points of condensation by respective ones of the condenser lenses to produce output signals representing differences in condensation points that occur as the lenses depart from or approach the drawing surface. A drive unit effects relative displacement between the scanning optical system and the drawing board in response to the outputs from the light-detecting elements.

Drawing surface adjusting mechanism for scanning pattern drawing

An apparatus for correcting a scranning beam produced by a polygonal mirror tilting in small surface segments in each mirror surface segment caused by uneven mirror surfaces of the polygonal mirror. Data indicative of the amount of tilting in each of the surface segments is stored in a memory, which is addressed by a data signal indicative of the present scanning position of the polygonal mirror. Output data from the memory is applied to an acousto-optical modulator disposed in the beam path between the light source and the polygonal mirror.

Apparatus for correcting scanning beams on basis of tilting of surface

A monitor mechanism for use with a scanning optical apparatus in which the direction of polarization is utilized to separate a source laser light beam into a pattern drawing and a monitor beamlet and to synthesize them again into a single after passing through a scanning lens and beam deflector. The two beamlets can thus be controlled so as to project towards the deflector and scanning lens in the same direction, which is effective in reducing the offset between the pattern drawing and monitor beams that may occur on account of such factors as variations in lens performance.

Monitor mechanism for use with a scanning optical apparatus with

A drawing surface adjusting mechanism for use with a scanning pattern drawing apparatus capable of not only moving a drawing board in a vertical direction but also tilting it, whereby the chance of bringing the drawing surface within the depth of focus of a scanning lens is increased even if the drawing surface has waviness or other flaws within the width of a single storke of scanning. The drawing surface adjusting mechanism of the invention includes a drawing board for supporting a workpiece that is to be scanned with a scanning optical system by means of a unidirectionally tracing light beam, transport means for allowing the drawing board and the scanning optical system to slide relative to each other in a direction that crosses the direction of beam tracing at right angles, a first and a second drive mechanism which are spaced apart in the tracing direction and which move one side of the drawing board in a direction parallel to the direction of the beam, tilt control means for inclining the drawing board with respect to the transport means by making the drive amount of the first drive means different from that of the second drive means, and translation control means for effecting a translational movement of the drawing board with respect to the transport means by making the drive amount of the first drive means equal to that of the second drive means.

Drawing surface adjusting mechanism for use with scanning pattern

A table assembly that is simple in construction and which yet resists yawing in an effective way and is adapted for use with a scanning pattern drawing apparatus which involves continuous movements of the table. The inventive table assembly includes a master table that is slidable in one direction with respect to a fixed portion of the overall assembly and to which a drive force for causing the table to slide in the one direction is transmitted directly, and a working table that is slidable in the one direction with respect to the fixed portion and which is linked to the master table by connecting means having rigidity in the one direction and elasticity in a direction perpendicular to the one direction.

Growing community of inventors

Tokyo, Japan

Jun Nonaka