International Business Machines Corporation

Shanghai Micro Electronics Equipment Co., Ltd.

Jun Ming Guan

Yi He

Tian Qi Han

Hai Feng Yao

Yong Wang

Zhiyong Yang

Xiaoping Li

Yingsheng Li

Shaowen Gao

Wenfeng Sun

Yanmin Cai

Provided are computer program product, system, and method for loading dependency library files from a shared library repository in an application runtime environment. A determination is made of a dependency tree of dependency library files for an application to load into an application runtime environment. A determination is made as to whether a shared library repository includes all the dependency library files in the dependency tree. The shared library repository is updated to include any dependency library files not in the dependency tree of the application. Access is provided to the dependency library files in the shared library repository in the dependency tree in the application runtime environment. The application is started in the application runtime environment in response to providing access to the dependency library files in the application runtime environment.

Loading dependency library files from a shared library repository in an application runtime environment

A precise positioning system for dual stage switching exposure, which includes a base, a first wafer stage positioning unit disposed on the base for a pre-processing workstation, and a second wafer stage positioning unit for an exposure workstation. Each of the wafer stage positioning units includes a wafer stage, a motion positioning detector, an X-direction guide bar, and a Y-direction guide bar. The pre-processing workstation and the exposure workstation both have two X-direction guide bars positioned on and movable along the Y-direction guide bars. The X-direction guide bars of adjacent workstations can be connected to each other.

Precise positioning system for dual stage switching exposure

Growing community of inventors

Shanghai, China

Jun Ming Guan