Asahi Kasei E-Materials Corporation

Asahi Kasei Kabushiki Kaisha

Tokico, Ltd.

Hitachi, Ltd.

Jun Koike

Fujito Yamaguchi

Masatoshi Maeda

Shinji Matsumoto

Naoki Inoue

Tomohiko Nakamura

Tetuo Kato

Hiroyuki Akiyama

Yoshimichi Mitamura

Masanori Tsuruta

Hiromi Machida

Toshinori Hachiya

Akiyasu Funakawa

Naoki Hosomi

Yoshifumi Kado

Keigo Takeguchi

Aya Takagiwa

Ryuichi Ito

Shinji Arihisa

Masayuki Miyaji

Koki Fuchigami

Kensuke Hangyo

Tsuyoshi Yorishige

To provide a resin mold which is excellent in adhesion to a substrate, excellent in release properties from a transfer material resin, further excellent in durability of the resin mold itself, and which endures repetition transfer to the transfer material resin, a resin mold of the invention is a resin mold having a fine concavo-convex structure on the surface, and is characterized in that the fluorine element concentration (Es) in a resin mold surface portion is the average fluorine element concentration (Eb) in the resin forming the resin mold or more.

Resin mold

A function transfer product () is provided with a carrier () having a concavo-convex structure () of nanostructure, and a functional layer () provided on the concavo-convex structure (). The functional layer () is beforehand provided on the surface of the concavo-convex structure (), and is directly brought into contact with one main surface of a target object (), and then the carrier () is removed from the functional layer () to transfer the functional layer () to the target object (). An average pitch of the concavo-convex structure () ranges from 1 nm to 1500 nm, the functional layer () contains a resin, and a ratio (Ra/lor) between surface roughness (Ra) on the exposed surface side of the functional layer () and a distance between a top position of a convex-portion of the concavo-convex structure () and the exposed surface of the functional layer () is 1.2 or less. Further, the functional layer () is arranged inside concave portions (), and the exposed surface thereof is in a non-liquid state at a temperature of 20&#xb0; C. under light shielding. It is possible to add the function onto the target object () with high accuracy.

Function transfer product, functional layer transfer method, packed product, and function transfer film roll

Disclosed is an inorganic composition for transferring a fine unevenness by which a fine unevenness made of an inorganic material capable of controlling a refractive index can be fabricated through a suitable transfer process. The composition according to the present invention contains a silicone compound and at least two types of metal alkoxides, wherein the metal alkoxides include a metal alkoxide having a metal species M1 (where M1 denotes at least one metal element selected from a group consisting of Ti, Zr, Zn, Sn, B, In, and Al) and a metal alkoxide having a metal species Si. In addition, a ratio between a molarity Cof the metal alkoxide having the metal species M1 and a molarity Cof the metal alkoxide having the metal species Si in the inorganic composition for transferring a fine unevenness satisfies a condition of 0.2&#x2264;C/C&#x2264;24.

Inorganic composition for transferring a fine unevenness

A pattern wafer () for LEDs is provided with an uneven structure A () having an arrangement with n-fold symmetry substantially on at least a part of the main surface, where in at least a part of the uneven structure A (), a rotation shift angle &#x398; meets 0&#xb0;&#x3c;&#x398;&#x2266;(180/n)&#xb0; in which &#x398; is the rotation shift angle of an arrangement axis A of the uneven structure A () with respect to a crystal axis direction in the main surface, and a top of the convex-portion of the uneven structure A () is a corner portion with a radius of curvature exceeding '0'. A first semiconductor layer (), light emitting semiconductor layer () and second semiconductor layer () are layered on the uneven structure A () to constitute an epitaxial wafer () for LEDs. It is possible to provide the pattern wafer for LEDs and epitaxial wafer for LEDs with cracks and internal quantum efficiency IQE improved.

Pattern wafer for LEDs, epitaxial wafer for LEDs and method of manufacturing the epitaxial wafer for LEDs

In an optical substrate (), a concave-convex structure () including a plurality of independent convex portions (to) and concave portions () provided between the convex portions (to) is provided in a surface. The average interval Pave between the adjacent convex portions (to) in the concave-convex structure () satisfies 50 nm&#x2266;Pave&#x2266;1500 nm, and the convex portion () having a convex portion height hn satisfying 0.6 h&#x2267;hn&#x2267;0 h for the average convex portion height Have is present with a probability Z satisfying 1/10000&#x2266;Z&#x2266;1/5. When the optical substrate () is used in a semiconductor light-emitting element, dislocations in a semiconductor layer are dispersed to reduce the dislocation density, and thus internal quantum efficiency IQE is improved, and a waveguide mode is removed by light scattering and thus the light the extraction efficiency LEE is increased, with the result that the efficiency of light emission of the semiconductor light-emitting element is enhanced.

Optical substrate, semiconductor light-emitting element and method of manufacturing semiconductor light-emitting element

To provide a substrate for optics for enabling the color shift caused by diffraction of light to be reduced, a substrate for optics () is provided with a fine-structure layer including dots () comprised of a plurality of convex portions or concave portions extending in the direction of from a main surface of a substrate to outside the surface, the fine-structure layer has a plurality of dot lines in which a plurality of dots is arranged with a pitch (Py) in the first direction inside the main surface of the substrate, while having a plurality of dot lines in which a plurality of dots is arranged with a pitch (Px) in the second direction orthogonal to the first direction inside the main surface of the substrate, and both of the pitch Py and the pitch Px are inconstant intervals and are of nano-order.

Substrate for optics and light emitting device

To provide a fine-structure layered product, and a preparation method of a fine-structure layered product using the fine-structure layered product for enabling a fine concavo-convex structure excellent in environmental resistance, weather resistance and long-term stability to be formed with a large area and high productivity, and provide a manufacturing method of a fine-structure product for enabling a large area to be made with high productivity, a fine-structure layered product of the invention is provided with a substrate, a resin layer that is formed on one main surface of the substrate and that has a fine concavo-convex structure on its surface, and an inorganic layer that is provided on the fine concavo-convex structure of the resin layer and that contains a sol-gel material having a fine concavo-convex structure in a shape associated with the fine concavo-convex structure of the resin layer, where a fluorine element concentration (Es) in a region on the inorganic layer side of the resin layer is higher than an average fluorine concentration (Eb) in the resin layer.

Fine-structure layered product, preparation method of the fine-structure layered product and manufacturing method of a fine-structure product

A light extraction product () for a semiconductor light emitting device is provided with a concavo-convex structure layer (), provided with a concavo-convex structure () on a surface thereof, having a first refractive index (n1) and a light extraction layer (), provided on the convex portion of the concavo-convex structure (), having a second refractive index (n2), where in a first light extraction layer () a distance Lcv between an average position Sh of tops of the convex-portions and a convex-portion upper interface average position Scv of the first light extraction layer () meets equation (1) 10 nm&#x2266;Lcv&#x2266;5000 nm, in the concavo-convex structure () a convex-portion average height H meets equation (2) 10 nm&#x2266;H&#x2266;5000 nm, an average pitch P meets equation (3) 50 nm&#x2266;P&#x2266;5000 nm, and the distance Lcv and the convex-portion average height H meet equation (4) 50 nm&#x2266;Lcv+H&#x2266;6000 nm. It is possible to improve light extraction efficiency from the semiconductor light emitting device using the light extraction product (), and further to enhance long-term reliability of the semiconductor light emitting device.

Light extraction product for semiconductor light emitting device and light emitting device

To provide a substrate for optics provided with a fine-structure product which improves luminous efficiency of an LED while improving internal quantum efficiency IQE by decreasing the number of dislocation defects in a semiconductor layer, a substrate for optics () is provided with a fine-structure layer () including dots comprised of a plurality of convex portions () extending in the direction of from the main surface of a substrate () to outside the surface, where the fine-structure layer () has a plurality of dot lines (-to-N) in which a plurality of dots is arranged with a pitch Py in the first direction in the main surface of the substrate (), while having the plurality of dot lines in which a plurality of dots is arranged with a pitch Px in the second direction orthogonal to the first direction in the main surface of the substrate (), one of the pitch Py and the pitch Px is a constant interval of nano-order, while the other one is an inconstant interval of nano-order, or both are inconstant intervals of nano-order.

Substrate for optics having a plurality of dot lines, semiconductor light emitting device. and exposure apparatus

Disclosed is a layered product for fine pattern formation and a method of manufacturing the layered product for fine pattern formation, capable of easily forming a fine pattern having a thin or no remaining film in order to form a fine pattern having a high aspect ratio on a processing object. The layered product for fine pattern formation (1) of the present invention used to form a fine pattern () in a processing object () using a first mask layer () includes: a mold () having a concavo-convex structure () on a surface; and a second mask layer () provided on the concavo-convex structure (), wherein in the second mask layer (), a distance (lcc) and a height (h) of the concavo-convex structure () satisfy Formula (1) 0&#x3c;lcc&#x3c;1.0 h, and a distance (lcv) and the height (h) satisfy Formula (2) 0&#x2266;lcv&#x2266;0.05 h.

Layered product for fine pattern formation and method of manufacturing layered product for fine pattern formation

Disclosed is a layered product for metamaterial transfer for transferring a metamaterial layer onto a substrate, including: a resin mold having a fine convex-concave structure on a surface; and an inorganic layer as a metamaterial layer including at least one dielectric layer and at least one metal layer deposited on a surface of the resin mold, wherein resin of the resin mold contains fluorine, and a ratio between an average elemental fluorine concentration Eb of the resin and an elemental fluorine concentration Es of the surface of the resin mold satisfies the following equation: 200&#x2267;Es/Eb&#x2267;5.0.

Layered product for metamaterial transfer and metamaterial transferred substrate

A compact vehicle height control system is capable of changing the spring constant of gas springs to thereby control the vehicle attitude stabilizing characteristics so as to provide a comfortable vehicle ride. Pilot-controlled directional control valves are interposed in passages that connect first and second gas springs in parallel. When the pilot-controlled directional control valves are opened, the first and second gas springs are communicated with respective cylinders in parallel, whereas, when the directional control valves are closed, only the first gas springs are communicated with the cylinders, thereby changing the spring constant. The pilot-controlled directional control valves are hydraulically operable, thereby eliminating solenoid operated valves.

Growing community of inventors

Tokyo, Japan

Jun Koike