Canon Kabushiki Kaisha

Jun Kawashima

Kazuhiko Morimura

Kenichi Morikawa

Yuji Kojima

Jun Moizumi

Takahiro Takiguchi

Ken-ichi Morikawa

An exposure apparatus that performs an exposure operation of exposing a substrate via a projection optical system is provided. The apparatus includes a temperature regulator configured to regulate a temperature distribution on an optical element of the projection optical system, and a controller configured to perform, in an exposure operation period in which the exposure operation is executed, a first process of controlling the temperature regulator so as to reduce a change of aberration of the projection optical system caused by execution of the exposure operation. In accordance with detection of a predetermined event before the exposure operation period, the controller performs, before performing the first process, a second process for reducing the aberration of the projection optical system using a method different from the first process.

Exposure apparatus, exposure method, and article manufacturing method

An exposure apparatus for exposing a substrate to radiant energy comprises a controller configured to determine a shot layout based on data representing a surface shape of the substrate, and an exposure unit configured to expose the substrate to the radiant energy in accordance with the shot layout determined by the controller.

Exposure apparatus, information processing apparatus, and method of manufacturing device

A switching apparatus includes an identification device for identifying received real-time packets; a measurement device for measuring a reception interval of the real-time packets according to the identification identified by the identification device; and an output device for giving priority to the real-time packets over other types of packets and outputting the real-time packet by priority based on the measurement measured by the measurement device.

Switching apparatus for switching real-time packet in real time and packet switching method

A delay in packet output due to packet fragmentation processing is reduced. If input data is output upon being subjected to fragmentation processing, fragmented data, from among a plurality of fragmented data items fragmented based upon a set value in an MTU register, which belongs to a first fragmented packet containing information that is based upon all fragmented packets is stored in a fragment buffer. After all fragmented packets from a second fragmented packet onward to which other fragmented data items belong are output, the first fragmented packet is output.

Communication apparatus and method

This invention provides a transmission system and control method capable of reliably transmitting real-time data. A switching device and router each serving as an intermediate device mediate an iso-data packet sent from each iso-data server to a predetermined terminal at a timing designated by an iso-packet from the iso-server. If a plurality of iso-data packets conflict in the transmission path, the switching device and router collectively continuously output the plurality of iso-data packets.

Transmission system and control method

A communication control device comprises a calculation part for calculating the number of frames and the frame length for transmitting the transmit data, a payload division part for dividing the transmit data into frame units based on the calculation results of the calculation part, and a header generation part for generating a header to be appended to the transmit data of frame unit based on the calculation results of the calculation part in the midst of dividing the transmit data by the payload division part. Thereby, the parallel processing ability of the hardware can be exhibited, a memory management method can be simplified, and the transmit data can be outputted as the frame at high speed.

Communication control device and communication control method

Frames of different priority levels are queued in a plurality of queues, e.g., first priority queue, second priority queue and third priority queue. If it is judged that a lower priority frame can be completely transmitted by the timing of transmitting a higher-priority frame based on the frame length, the lower-priority frame is transmitted, and otherwise, the lower-priority frame is not transmitted. Accordingly, frame transmission control that is applicable to fixed-length frames and variable-length frames is realized in a frame scheduler for an apparatus having a function of outputting frames. Also, priority-based control of frames which is suitable for a layer 2 switch or the like and which is adaptable to processing in a high-speed network is realized without providing an IP fragment.

Growing community of inventors

Tokyo, Japan

Jun Kawashima