Shimadzu Corporation

Dainippon Screen Mfg. Co., Ltd.

Jun Kawai

Nobuhiro Mukuta

Toshiaki Nakamura

Tomoya Sugie

Toru Hayakawa

Hiroshi Muraoka

Kiyoshi Akao

Tadahiko Nakahara

Osamu Horiguchi

Material testing machine

Medical X-ray imaging machine

Mass spectrometry

Spectrophotometer

Mass analyzer

Deposition machine

Mass microscope

Video camera

A method of preparing a schedule for a substrate processing apparatus. A plurality of lots are processed by the substrate processing apparatus including a plurality of processing sections for processing substrates. An order of processing the lots is determined based on a recipe including a plurality of processing steps for successively processing the lots in the processing sections. The method includes, in determining the processing order, a step of allocating a first processing step for one of the lots, and thereafter allocating, as a next processing step, one of next processing steps for the lots preceded by a processing step having the earliest

Scheduling method and program for a substrate processing apparatus

A method of preparing a schedule for a substrate processing apparatus having a plurality of resources for processing substrates, the schedule determining timing of using each resource for processing the substrate. The method comprising the steps of determining the timing of using each resource in advance of starting an actual processing of the substrates, defining a capacity resource as a resource usable within a maximum quantity of consumption of a consumer item used by the resources, and using the resources in processing the substrates while avoiding a total quantity of the consumer item used by the resources exceeding the maximum quantity of consumption of the capacity resource.

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Kyoto, Japan

Jun Kawai