Ihi Corporation

Jun Izawa

Norihito Kawaguchi

Miyuki Masaki

Ryusuke Kawakami

Kenichiro Nishida

Nobuhiko Kubota

Masaru Morita

Yasunori Hamano

A laser annealing apparatus is provided that is capable of reducing irradiation unevenness of laser light caused by a refraction phenomenon of the laser light due to fluctuation in the temperature of inert gas. The laser annealing apparatus includes a gas supply unit for supplying inert gas G to at least a laser irradiation area of a workpiece, and a gas temperature controller for regulating the temperature of the inert gas G. The gas temperature controller controls the temperature of the inert gas G supplied to the laser irradiation area so as to decrease a temperature difference between the temperature of the inert gas G and the atmospheric temperature of a space (a room R) that is disposed outside the supply area of the inert gas so the temperature controlled inert gas surrounds the optical path of the laser light.

Laser annealing apparatus

A light detection value determines concentration of a target component, without using a laser emitter of high laser intensity or a large light collector. By changing orientation of the laser emitter about a horizontal axis, or height of the laser emitter, a laser irradiation position on a ground or water surface is switched between first and second irradiation positions. A photodetector detects first scattered light scattering from the first laser beam at the first irradiation position, second scattered light scattering from the second laser beam at the first irradiation position, third scattered light scattering from the first laser beam at the second irradiation position, and fourth scattered light scattering from the second laser beam at the second irradiation position. A concentration calculator calculates concentration of a target component between the first and second irradiation positions, based on detection values of the first, second, third, and fourth scattered light.

Apparatus and method for determining concentration of gaseous component

Growing community of inventors

Tokyo, Japan

Jun Izawa