Hitachi, Ltd.

Jun'ichi Tanaka

Toshio Masuda

Makoto Koizumi

Tetsunori Kaji

Toru Otsubo

Katsuya Watanabe

Katsuhiko Mitani

Hideshi Fukumoto

Ichiro Sasaki

Shigeru Shirayone

A plasma processing apparatus and a method therefor which can achieve a preferred process rate, a fine pattern process capability, a selectivity and uniformity of processing at the same time compatibly for a large size wafer, which effects are achieved by controlling the plasma state and the dissociation state of etching gas through control of the electron resonance through application of a magnetic field thereto. A high frequency power at 20-300 MHz is applied across a pair of electrodes in a vacuum process chamber, and a magnetic field is formed parallel to the plane of the electrodes in the space between the electrodes. By controlling the intensity of the magnetic field in a range of 100 gauss or smaller, formation of electron cyclotron resonance and electron sheath resonance occurring from interaction between the electrical field and the magnetic field in the electrode sheath portion is controlled. Thereby, the plasma state, i.e., the electron density, electron energy distribution and dissociation state of the process gas in the plasma, can be controlled. The magnetic field is generated by a plurality of coils, an outer shield, and pendant yoke to form magnetic field parallel to the plane of the electrodes in the space between the upper and the bottom electrodes.

Plasma processing system and plasma processing method

Growing community of inventors

Chiyoda-machi, Japan

Jun'ichi Tanaka