Korea Institute of Science and Technology

Jun-Hyun Han

Kwang-Koo Jee

Yoon-Bae Kim

Jin-young Choi

Hyun-Kwang Seok

Yu-Chan Kim

Ji-Young Byun

Seung-Hee Han

Sung-Bai Lee

Disclosed are an apparatus and a method for plasma ion implantation of a solid element, which enable plasma ion implantation of a solid element. According to the apparatus and method, a sample is placed on a sample stage in a vacuum chamber, and the inside of the vacuum chamber is maintained as a vacuum state. And, gas is supplied in the vacuum chamber, a first pulsed DC power is applied to a magnetron sputtering source so as to generate plasma ions of a solid element. The plasma ions of a solid element sputtered from the source are implanted on the surface of the sample. The first power is a pulse DC power capable of applying a high power the moment a pulse is applied while maintaining low average power. And, simultaneously with the applying of the first pulse power, a second power may be supplied to the sample stage, which is a high negative voltage pulse accelerating plasma ions of a solid element to the sample and synchronized to the pulse DC power for magnetron sputtering source. And, inductively coupled plasma may be generated in the vacuum chamber via antenna so as to increase ionization rate of a solid element and lower operation pressure of magnetron sputtering source.

Method and apparatus for plasma ion implantation of solid element

A method for enhancing an initial tension by changing a wound direction of a coil spring. A large and precise initial tension is provided to the coil spring. An actuator having an excellent function is prepared by using a shape memory alloy. Each shape of the coil spring at high and low temperatures can be controlled by a flexible shape memory effect.

Method to provide initial tension for coil spring and its application

A new shrink fitting method including deformation is disclosed, in which a high bonding force can be obtained without accurate mechanical process such as forming an insertion body having an outer diameter greater than an inner diameter of an object for receiving the insertion body. The shrink fitting method comprises preparing a pipe and a rod material whose inner and outer diameters are different from each other; bonding the pipe and the rod material to each other in a state that the pipe or the rod material is deformed by heating; deforming the pipe to allow the inner diameter of the pipe to be equal to the outer diameter of the rod material; and cooling the bonded pipe and rod material. The shrink fitting method can be widely used for various mechanical parts.

Shrink fitting method including deformation

Growing community of inventors

Seoul, South Korea

Jun-Hyun Han