Semes Co., Ltd.

Samsung E&a Co., Ltd.

Jun Ho Seo

Tae Jin Park

Ju Won Kim

Dong Woon Park

Sang Pil Yoon

Yong Jung Kim

Joeng Min Oh

Chae Gwan Park

Ki Sang Eum

Man Kyu Kang

Hee Man Ahn

Yang Yeol Ryu

Jae Hun Jeong

Byoung Ok Kim

Ju Eun Kim

An apparatus for processing a substrate includes a first processing unit configured to have a first processing container having a first inner space and a first support unit supporting and rotating the substrate in the first inner space; a second processing unit configured to have a second processing container having a second inner space and a second support unit supporting and rotating the substrate in the second inner space; an exhaust unit configured to exhaust the first and the second inner space; a first exhaust pipe configured to have a first exhaust port for introducing atmosphere of the first inner space and exhaust the atmosphere introduced through the first exhaust port to the integrated duct; and a second exhaust pipe configured to have a second exhaust port for introducing atmosphere of the second inner space and exhaust the atmosphere introduced through the second exhaust port to the integrated duct.

Apparatus for smoothly exhausting the atmosphere in a processing space when rotating a substrate with liquid

Disclosed are an electrostatic precipitator system and method. The disclosed electrostatic precipitator system includes: an electrostatic precipitator; a main hopper which is disposed below the electrostatic precipitator so as to be in fluid communication with the electrostatic precipitator; a plurality of sub-hoppers disposed below the main hopper so as to be in fluid communication with the main hopper; a vertical duct disposed below each sub-hopper so as to be in fluid communication with each sub-hopper; and a water tank disposed below the vertical duct so as to be in fluid communication with the vertical duct.

Electrostatic precipitator system and method

A waste heat recovery system and method are disclosed. The waste heat recovery system disclosed herein comprises: a waste heat recovery boiler; a waste heat supply member configured to supply waste heat to the waste heat recovery boiler; and a water tank configured to fluidly communicate with the waste heat supply member.

Waste heat recovery system and method

An apparatus for treating a substrate, the apparatus comprising: a treating container having an inner space; a support unit supporting and rotating the substrate in the inner space; and an exhaust unit exhausting an air flow in the inner space, wherein the treating container includes an outer cup providing the inner space; and an inner cup disposed at the inner space and spaced apart from the outer cup, and wherein the outer cup has a protrusion at a side wall thereof.

Apparatus for treating a substrate

A substrate treatment apparatus is provided. The substrate treatment apparatus includes a substrate support part provided with a seating surface and configured to support a substrate, a guide ring annularly disposed along an edge of the substrate support part to surround the substrate, and a centering part provided inside the guide ring and configured to center the substrate by moving in a direction parallel to the seating surface to pressurize the edge of the substrate.

Substrate treatment apparatus

Growing community of inventors

Seoul, South Korea

Jun Ho Seo