Samsung Electronics Co., Ltd.

Dnf Co., Ltd.

Jun Hee Cho

Ga Jin Song

Young Kyu Seon

Byung S Jung

Seung Chan Heo

Jae Sook Joo

Jae Woo Suh

Gye Hun Jeon

So Jung Jang

Kwang Ho Lim

Jeong Won Yang

Jong Seung Baek

Seong Hoon Choi

Gyu-Hee Park

Joong Jin Park

Youn Joung Cho

Byeong Il Yang

Hee Yeon Jeong

Eun Hyea Ko

Ji Yu Choi

Byung Seok Jung

An atomic layer etching method capable of precisely etching a metal thin film at units of atomic layer from a substrate including the metal thin film, includes forming a metal layer on a substrate, and etching at least a portion of the metal layer. The etching at least a portion of the metal layer includes at least one etching cycle. The at least one etching cycle includes supplying an active gas onto the metal layer, and supplying an etching support gas after supplying the active gas. The etching support gas is expressed by the following general formula wherein each of R1, R2, R3, R4 and R5 independently includes hydrogen or a C-Calkyl group, and N is nitrogen.

Atomic layer etching method and semiconductor device manufacturing method using the same

An electronic device includes a touch screen display, an input/output interface, a communication circuit, a memory, and a processor, and the processor modifies screen configuration information associated with at least a part of a resolution, a density, and an orientation of a screen output by the electronic device if the electronic device is connected to the external display device through the input/output interface, determines whether a target application to be displayed on the external display device supports resizing of a window that displays an execution screen of the target application, configures a first type of window which is resizable if the target application supports the resizing, configures a second type of window with a fixed size if the target application does not support the resizing, and displays the first type of window or the second type of window on the external display device.

Electronic device and method for managing window

Growing community of inventors

Suwon-si, South Korea

Jun Hee Cho