Magnachip Semiconductor, Inc.

Db Hitek Co., Ltd.

Jun Hee Cho

Tae Hoon Lee

Jin Seong Chung

Disclosed is a semiconductor device and a method for manufacturing the same and, more particularly, a semiconductor device and a method for manufacturing the same seeking to improve on-resistance and breakdown voltage characteristics compared to existing semiconductor structures by forming an air gap under a gate field plate adjacent to a gate electrode or over a drift region of the semiconductor device.

Semiconductor device and method for manufacturing same

A method for manufacturing a semiconductor device includes forming a gate insulation film and a polysilicon layer on a substrate, forming a polysilicon pattern by etching the polysilicon layer, forming an opening in the polysilicon pattern that exposes a part of the polysilicon pattern by forming a mask pattern on the polysilicon pattern, forming a gate electrode by etching the part of the polysilicon pattern exposed through the opening, forming a P-type body region by ion implanting a P-type dopant onto the substrate using the gate electrode as a mask, forming an N-type LDD region on the P-type body region by ion implanting an N-type dopant onto the substrate using the gate electrode as a mask, forming a spacer on a side surface of the gate electrode, and forming an N-type source region on a side surface of the spacer.

Semiconductor device and method for manufacturing the same

A power semiconductor device includes a drain region and a source region disposed on a substrate, a gate insulating layer and a gate electrode disposed on the substrate and disposed between the drain region and the source region, a protection layer in contact with a top surface of the substrate and a top surface of the gate electrode, a source contact plug connected to the source region, a drain contact plug connected to the drain region, and a field plate plug in contact with the protection layer, wherein a width of the field plate plug is greater than a width of the source contact plug or a width of the drain contact plug.

Growing community of inventors

Cheongju-si, South Korea

Jun Hee Cho