Average Co-Inventor Count = 6.46
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Semes Co., Ltd. (2 from 777 patents)
2 patents:
1. 12311415 - Substrate processing apparatus and substrate processing method
2. 12224189 - Substrate type sensor and method of measuring the impact point and the impact force of chemical