Movaz Networks, Inc.

Jun Guo

Steven L Garverick

Narayanan Rajan

A multiplexed analog control system for an micro electromechanical systems (MEMS) array of electrostatic actuators, such as tiltable mirrors in an optical switch. Each actuator includes a variable gap capacitor formed as part of the movable mechanical element. A hold capacitor is connected to each actuator capacitor, and a selectable high-voltage inverter connects them to provide a bipolar drive signal of 50% duty cycle. A single power digital controlled current source is connected to all the drive circuits to provide a high-power correction signal. Address decoders enable a selected one of the drive circuits to add or subtract the correction from the hold capacitor.

Growing community of inventors

Los Altos Hills, CA, United States of America

Jun Guo