Samsung Electronics Co., Ltd.

Jun Goo Kang

Hyun-Suk Lee

Jin-Su Lee

Sang Yeol Kang

Hong Sik Chae

Gi Hee Cho

Sang Hyuck Ahn

A semiconductor device includes a substrate, first and second supporter patterns stacked sequentially on the substrate in a first direction and spaced apart from an upper surface of the substrate, a lower electrode hole that extends through the first and second supporter patterns on the substrate in the first direction, an interface film on side walls and a bottom surface of the lower electrode hole, a lower electrode inside of the lower electrode hole on the interface film, a capacitor dielectric film that is in physical contact with side walls of the interface film, an uppermost surface of the interface film, and an uppermost surface of the lower electrode, the uppermost surface of the interface film is formed on a same plane as an upper surface of the second supporter pattern.

Growing community of inventors

Seoul, South Korea

Jun Goo Kang