Intel Corporation

Google Inc.

Jun F Zheng

Giang T Dao

Qing Ma

Jin Hyung Lee

Changhong Joy Jiang

Yi Wang

Pedram Zare Dashti

A device includes an array of optical transmitters having first and second temperature sensors each disposed at or near a first and second end of the array of the transmitters. The device includes a controller in communication with the temperature sensors and the transmitters. The controller receives temperature measurements from the temperatures sensors and determines a temperature difference between a first temperature measurement of the first temperature sensor and a second temperature measurement of the second temperature sensor. The controller determines a compensation for each transmitter within the transmitter array based on the temperature difference and a transmitter position within the array of transmitters. The compensation causes the corresponding transmitter to transmit at a wavelength associated with that transmitter. The controller executes the compensations for the transmitters.

Temperature compensation in an optical transmitter

A 1&#xd7;N fanout waveguide detector is disclosed. The detector includes a multiple-mode interference (MMI) cavity with input and output ends. A single-mode waveguide is optically coupled to the input end of the MMI cavity so that the optical power in the guided mode is distributed over N modes. The MMI cavity forms N interference nodes at or near its output end. N waveguide detectors are optically coupled to the output end at or near the N interference nodes. The waveguide detectors each have a waveguide that is evanescently coupled to an intrinsic region of a PIN detector. The width of the detector waveguide core, which can be sub-micron, defines the carrier collection distance between the electrodes of the PIN detector. Further, the length of the detector waveguide can be selected to maximize optical absorption to provide optimum quantum efficiency. The waveguide detectors are connected in parallel to provide a high-output photocurrent.

1&#xd7;N fanout waveguide photodetector

1xN fanout waveguide photodetector

A method and apparatus to remove contamination and control electrostatic discharge in-situ in a semiconductor device manufacture process. In an embodiment, the method includes providing a reticle having first and second planar surfaces into a chamber. A circuit pattern of opaque material may be disposed on the first planar surface of the reticle. The method further includes irradiating the reticle using an ultraviolet light radiation beam to remove contamination disposed on the first and second planar surfaces of the reticle and to neutralize static electricity accumulated by the reticle.

Apparatus and method for removing photomask contamination and controlling electrostatic discharge

A method for making a photolithographic mask. The method comprises forming a film on a substrate that deforms the substrate, and applying a deformation reducing agent to the substrate to reduce the amount of deformation that the film caused. In a preferred embodiment, the deformation reducing agent comprises one or more films, which are formed on one side of the substrate, that balance the substrate deformation effect of one or more films that are deposited on the other side of the substrate. The film or films that constitute the deformation reducing agent may be similar to, or different from, an absorption film and/or any other films deposited on the substrate or on the absorption film.

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Palo Alto, CA, United States of America

Jun F Zheng