Samsung Electronics Co., Ltd.

Jun-bum Park

Byeong-hwan Jeon

Tae-joong Kim

Kyung-sik Kang

Ho-jun Shim

Jae-chol Joo

Sang-Ok Seok

Manufacturing a device may include inspecting a surface of an inspection target device. The inspecting may include forming a metal layer on a surface of the inspection target device on which a minute pattern is formed, directing a beam of light to be incident and normal to the surface of the inspection target device, determining a spectrum of light reflected from the surface of the inspection target device, and generating, via the spectrum, information associated with a structural characteristic of the minute pattern formed on the inspection target device. The inspection target device may be selectively incorporated into the manufactured device based on the generated information.

Method of inspecting surface having a minute pattern based on detecting light reflected from metal layer on the surface

A clock signal generator includes an optic mirror rotatable to scan an incident light beam in a first direction, a grid plate including a plurality of grid arrays arranged in a second direction different from the first direction, wherein light reflected from the optic mirror is selectively passed through when the light beam is scanned on the grid plate in the first direction, the grid array being offset in the first direction by a particular distance with respect to an adjacent grid array, a light detector configured to detect a light passing through the grid arrays, and a pixel clock generator configured to generate a clock signal based on detection signals received from the light detector.

Clock signal generators and substrate inspecting apparatuses having the same

Semiconductor storage devices and methods of operating the same are provided. The semiconductor storage device including a non-volatile memory device, and a memory controller configured to control the non-volatile memory device, the memory controller including a performance control module, the performance control module configured to control a performance level of the memory controller based on state information of the memory controller may be provided.

Growing community of inventors

Goyang-si, South Korea

Jun-bum Park