Sumitomo Osaka Cement Co., Ltd.

Jun Arikawa

Nobuhiro Hidaka

Yukio Miura

Hironori Kugimoto

Megumi Ootomo

A ceramic joined body () includes: a pair of ceramic plates () that include a conductive material; and a conductive layer () and an insulating layer () that are interposed between the pair of ceramic plates (), a porosity at an interface between the pair of ceramic plates () and the insulating layer () is 4% or less, and a ratio of an average primary particle diameter of an insulating material which forms the insulating layer () to an average primary particle diameter of an insulating material which forms the ceramic plates () is more than 1.

Ceramic joined body, electrostatic chuck device, and method for producing ceramic joined body

A ceramic joined body () includes: a pair of ceramic plates () that include a conductive material; a conductive layer () and an insulating layer () that are interposed between the pair of ceramic plates (); and a pair of intermediate layers () that are interposed between the pair of ceramic plates () and the conductive layer () and are in contact with the pair of ceramic plates () and the conductive layer ().

A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μmat a magnification of 1000 times is 5 μm or lower.

Growing community of inventors

Tokyo, Japan

Jun Arikawa