Tokyo Electron Limited

Fuji Xerox Co., Ltd.

Kabushiki Kaisha Toshiba

Hitachi-kokusai Electric Inc.

Denso Corporation

The University of Tokyo

Kabushiki Kaisha Topcon

Sbi Pharmaceuticals Co., Ltd.

Chuo University

Jun Abe

Tatsuo Matsudo

Chishio Koshimizu

Takashi Ochi

Takeshi Ohse

Shinji Himori

Tomoyuki Yoshii

Yasuaki Watanabe

Makoto Hirota

Shota Oba

Norikazu Yamada

Koichi Nagami

Hachishiro Iizuka

Shigeru Inaba

Shinji Okuyama

Sakae Yoshioka

Kenta Urayama

Fumiyuki Honda

Hisataka Hayashi

Shinichi Kuramoto

Satoshi Sakata

Toshihiro Kanematsu

Nobumasa Furuya

Shinya Morikita

Akio Ui

Miho Ikeda

Yusuke Aoki

Toshikatsu Tobana

Fumiya Takata

Kazunobu Fujiwara

Masaaki Fukuhara

Yuki Mochizuki

Takeshi Kaminatsui

Kaoru Kumagai

Toru Ishikawa

Takayuki Yamashita

Tohru Tanaka

Kouji Matsushima

Kunihiko Sato

Takayuki Katsunuma

Makoto Kanno

Tetsuya Fujita

Akihiko Noda

Masanori Kato

Mitsuo Yamamoto

Kiwamu Takahashi

Motowo Nakajima

Yasuki Yamauchi

Koichiro Shinohara

Hidenori Ito

Akihiro Yokota

Takashi Ichikawa

Fuminori Abe

Naoki Tamaoki

Toru Isosu

Toru Teshigawara

Haruyuki Namba

Hidekiyo Tachibana

Hideaki Miyata

Takahide Inoue

Masashi Kajimoto

Minoru Chiba

Tomio Onuki

Yutaka Toyoda

Yoichi Watanabe

Satoshi Ueha

Nobuo Hirose

Shigeaki Harayama

Toshiaki Sagara

Takayuki Sunaga

Mikio Yamamoto

Natsumi Torii

Takuto Tanaka

Yoshio Shiina

Noriaki Imai

Yoko Ide

Noriaki Yamazaki

Yuki Kasai

Norihide Kurano

Shiho Matsuda

Makoto Watanabe

Toji Tokutsu

Shogo Shoji

Toshiaki Saijo

Junya Kato

Osamu Otosaka

Motoki Chibazaki

Kazuhiko Yoshii

Chishlo Koshimizu

There is provided a plasma processing apparatus for performing plasma processing or a substrate, comprising: a chamber; a substrate support disposed in the chamber and including a base, an electrostatic chuck on the base, and an edge ring disposed to surround a substrate mounted on the electrostatic chuck; a Radio Frequency (RF) power supply for supplying RF power for generating plasma from gases in the chamber; a DC power supply for applying a negative DC voltage to the edge ring; a waveform control element for controlling a waveform of the DC voltage; and a controller for controlling a time taken for the DC voltage to reach a desired value by adjusting a constant of the waveform control element.

Plasma processing apparatus and plasma processing method

In a plasma processing apparatus, a controller specifies a time point when a current starts to flow between an edge ring and a DC power supply after beginning an application of a negative DC voltage to the edge ring from the DC power supply. The controller specifies, from a voltage measurement value indicating a voltage of the edge ring at the time point, an estimate of a self-bias voltage of the edge ring generated by a supply of a radio frequency power. The controller sets a sum of an absolute value of the estimate of the self-bias voltage and a set value as an absolute value of the negative DC voltage to be applied to the edge ring by the DC power supply.

An apparatus for plasma processing is configured to generate plasma in a chamber and periodically apply a pulsed negative DC voltage to an upper electrode from a DC power supply in the plasma processing on a substrate and in plasma cleaning. A duty ratio of the pulsed negative DC voltage used for the plasma processing is smaller than a duty ratio of the pulsed negative DC voltage used for the plasma cleaning. An absolute value of an average value of an output voltage of the DC power supply used for the plasma processing is smaller than an absolute value of an average value of the output voltage of the DC power supply used for the plasma cleaning.

Apparatus and method for plasma processing

A plasma processing method according to an exemplary embodiment includes generating plasma from a film formation gas in a chamber of a plasma processing apparatus by supplying radio frequency power from a radio frequency power source. The plasma processing method further includes forming a protective film on an inner wall surface of a side wall of the chamber by depositing a chemical species from the plasma on the inner wall surface. In the forming a protective film, a pulsed negative direct-current voltage is periodically applied from a direct-current power source device to an upper electrode of the plasma processing apparatus.

Plasma processing method and plasma processing apparatus

There are provided a substrate processing apparatus and a substrate processing method realizing an effective reduction of a voltage change of a substrate on an electrode to reduce the variation of incident energy of ions entering the substrate. The substrate processing apparatus includes: a first electrode holding a substrate on a main surface of the first electrode; a second electrode facing the first electrode; a RF power source applying to the first electrode a RF voltage whose frequency is equal to or higher than 40 MHz; and a pulse voltage applying unit applying to the first electrode a pulse voltage decreasing in accordance with a lapse of time, by superimposing the pulse voltage on the RF voltage.

Substrate processing apparatus and substrate processing method

It is an object of the present invention to provide the eukaryotic microalgae, which have been genetically modified such that larger amounts of assimilation products produced by photosynthesis are directed to the synthesis of triglyceride (=triacylglycerol; TAG), and specifically, the present invention relates to a genetically modified strain of eukaryotic microalgae, in which a gene encoding an AGL1 protein is highly expressed, or a gene encoding an FAT1 protein and/or a gene encoding a DGAT2 protein are further highly expressed, as well as the gene encoding an AGL1 protein, wherein TAG productivity is improved in comparison to the parent strain thereof.

Genetically modified strain of eukaryotic microalga having improved triglyceride productivity, and use thereof

An object of the present invention is to provide a preventive and/or therapeutic agent for radiation damage that has a novel mechanism of action and can prevent and alleviate a wide range of symptoms of radiation damage for which no therapeutic measures have been available so far, and moreover, is highly safe to humans. A preventive and/or therapeutic agent for radiation damage comprising a compound represented by the following formula (I) such as 5-aminolevulinic acid (5-ALA) or a salt thereof as an active ingredient can be used to improve the survival rate, improve body weight reduction, and alleviate hematopoietic disorder: (wherein Rrepresents a hydrogen atom or an acyl group; and Rrepresents a hydrogen atom, a linear or branched alkyl group, a cycloalkyl group, an aryl group, or an aralkyl group).

Prophylactic and/or therapeutic agent for radiation damage

A substrate processing method uses a substrate processing apparatus including a chamber for accommodating a substrate, a lower electrode to mount the substrate, a first RF power applying unit for applying an RF power for plasma generation into the chamber, and a second RF power applying unit for applying an RF power for bias to the lower electrode. The RF power for plasma generation is controlled to be intermittently changed by changing an output of the first RF power applying unit at a predetermined timing. If no plasma state or an afterglow state exists in the chamber by a control of the first RF power applying unit, an output of the second RF power applying unit is controlled to be in an OFF state or decreased below an output of the second RF power applying unit when the output of the first RF power applying unit is a set output.

Substrate processing apparatus and substrate processing method using same

A rebroadcasting system for retransmitting a television broadcast, which was received from a satellite, in a segment broadcasting, such as one-segment broadcasting and three-segment broadcasting, comprises: charging a solar battery during the daytime; recording broadcasts during the retransmission halt time; retransmitting television broadcasts, which are received from the satellite, in real time by use of central (one or three) segments and the charged power during any time when the output of the solar battery is low, for example, during the night, before sunset, after sunrise, or a rainy day; reproducing the recorded broadcasts; and retransmitting the reproduced recorded programs by use of any remaining segments, for example, segments adjacent to the central segments.

Rebroadcasting system

A temperature measurement apparatus includes a light source; a first splitter that splits a light beam into a measurement beam and a reference beam; a reference beam reflector that reflects the reference beam; an optical path length adjustor; a second splitter that splits the reflected reference beam into a first reflected reference beam and a second reflected reference beam; a first photodetector that measures an interference between the first reflected reference beam and a reflected measurement beam obtained by the measurement beam reflected from a target object; a second photodetector that measures an intensity of the second reflected reference beam; and a temperature calculation unit. The temperature calculation unit calculates a location of the interference by subtracting an output signal of the second photodetector from an output signal of the first photodetector, and calculates a temperature of the target object from the calculated location of the interference.

Temperature measurement apparatus and method

A developing device includes a developing sleeve and a regulation portion. The developing sleeve includes a magnetism generating portion to which magnetic poles are attached. The developing sleeve holds a developer on an outer circumferential surface. The regulation portion includes a magnetic plate. A first segment connecting a peak position of the magnetic pole disposed at a position facing the magnetic plate and an axial center of the developing sleeve has an angle, with respect to a second segment connecting the magnetic plate and the axial center, equal to or less than 7 degrees on a downstream side in a rotation direction of the developing sleeve and equal to or less than 6 degrees on an upstream side in the rotation direction. An angle of a half value width of the magnetic pole is equal to or greater than 41 degrees to equal to or less than 52 degrees.

Developing device and image forming apparatus

An image forming apparatus includes an image forming section and a controller. The image forming section transfers a toner image to a transfer target and includes plural developing units. The plural developing units include a first developing unit and at least one second developing unit. The plural developing units each include an image holding body and a developing roller. The image holding body has an outer circumferential surface and is rotated. The controller controls the image forming section so that, when a low-area-coverage portion and a high-area-coverage portion are disposed adjacent to each other and are formed by the first developing unit, a correction toner image is superposed on a boundary portion, where the low-area-coverage portion and the high-area-coverage portion are adjacent to each other, by the at least one second developing unit.

Image forming apparatus including a controller that controls superposition of a correction toner image

A transport mechanism includes: a container that stores a specific developer; a transport body that transports the developer in an axial direction of a shaft about which the transport body rotates in the container while stirring the developer; a bearing that supports the transport body such that the transport body is rotatable about the shaft; and a restricting portion that has a substantially annular shape and a maximum magnetic force of about 20 mT or greater and about 50 mT or smaller and restricts the transportation of the developer past the restricting portion by surrounding the shaft, the restricting portion being provided nearer to a side on which the transport body transports the developer than the bearing in the axial direction of the shaft.

Transport mechanism, developing device, and image forming apparatus

There is provided a developing device including a first developing roller that is disposed to be rotatable with a desired distance set between the first developing roller and an outer circumferential surface of a rotatable latent image holding member, transports a developer onto an outer circumferential surface thereof while holding the developer by magnetic force, and has a substantially cylindrical shape, and a second developing roller that is disposed to be rotatable with desired distances set between the second developing roller and the respective outer circumferential surfaces of the corresponding latent image holding member and the corresponding first developing roller at a position on the downstream side of the first developing roller in a rotation direction of the latent image holding member, transports the developer onto an outer circumferential surface thereof while holding the developer by magnetic force, and has a substantially cylindrical shape.

Growing community of inventors

Kanagawa, Japan

Jun Abe