Agency for Science, Technology and Research

Singapore Health Services Pte Ltd

Julius Ming Lin Tsai

Ilker Ender Ocak

Navab Singh

Minkyu Je

Yuan Gao

Jinghui Xu

Mi Kyoung Park

Abdur Rub Abdur Rahman

Ming-Yuan Cheng

Ruiqi Lim

Jai Prashanth Rao

Allen Hum

Man I Lei

Margarita Sofia Narducci

Wai Pan Chan

There is provided a monolithically integrated multimodal sensor device for intracranial neuromonitoring, the sensor device including: a single substrate; a temperature sensor formed on a first portion of the single substrate for detecting temperature; a pressure sensor formed on a second portion of the single substrate for detecting intracranial pressure; and an oxygen sensor formed on a third portion of the single substrate for detecting oxygen concentration. In particular, sensing portions of the temperature sensor, the oxygen sensor and the pressure sensor, respectively, are formed at different layers of the sensor device. There is also provided an integrated multimodal sensor system incorporating the sensor device and the associated methods of fabrication.

Integrated multimodal sensor device for intracranial neuromonitoring

An electromechanical device and method of fabrication thereof comprising: providing a first wafer with a circuit arrangement on a first surface thereof and a first electrode on a second surface thereof; forming first and second via structures from the first surface to the second surface of the first wafer, said first via electrically connecting the first electrode with the circuit arrangement; providing a second wafer with a suspended structure on a first surface thereof; forming a second electrode on the suspended structure; forming an interconnect structure on the first surface of the second wafer that electrically connects with the second electrode; bonding the first wafer to the second wafer with the second surface of the first wafer facing the first surface of the second wafer, with the second via structure electrically connecting the circuit arrangement to the interconnect structure, and the first and second electrodes forming a capacitive structure.

Electromechanical device including a suspended structure and method of fabricating the same

According to embodiments of the present invention, a transducer is provided. The transducer includes a substrate, and a diaphragm suspended from the substrate, wherein the diaphragm is displaceable in response to an acoustic signal impinging on the diaphragm, wherein the transducer is configured, in a first mode of operation, to determine a direction of the acoustic signal based on a first displacement of the diaphragm in the first mode of operation, and to decide to accept or reject the acoustic signal based on at least one predetermined parameter and the determined direction of the acoustic signal, and in a second mode of operation, to sense the acoustic signal based on a second displacement of the diaphragm in the second mode of operation if the acoustic signal is accepted in the first mode of operation.

Transducer and method of controlling the same

According to embodiments of the present invention, a sensor is provided. The sensor includes a substrate, a beam suspended from the substrate, and a plurality of conductive lines arranged on the beam, wherein the beam is adapted to be displaced in response to a current flowing through the plurality of conductive lines, and a magnetic field interacting with the beam, and wherein the sensor is configured to determine a property of the magnetic field based on the displacement of the beam. According to further embodiments of the present invention, a method of controlling a sensor is also provided.

Sensor and method of controlling the same

In various embodiments, a sensor device is provided. The sensor includes a sensor receiving portion, a sensor arranged in the sensor receiving portion and a cap covering the sensor and the sensor receiving portion. The cap includes a plurality of recesses in the inner side wall of the cap for reducing the pressure measured by the sensor.

Sensor device

Growing community of inventors

Singapore, Singapore

Julius Ming Lin Tsai