Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asm IP Holding B.v. (1 from 1,145 patents)
1 patent:
1. 11664199 - Substrate processing apparatus and substrate processing method