Jds Uniphase Corporation

Julia Duncan

Karl M Kissa

Marc K Von Gunten

Charles Andrew Hulse

Benjamin F Catching

Jerry Zieba

Glen Drake

Donald M Friedrich

William J Minford

Jason Jiazhan Xu

Jason Reed

Hiren V Shah

The invention relates to a wafer scale process for the manufacture of optical waveguide devices, and particularly for the manufacture of ridge waveguide devices, and the improved waveguides made thereby. The present invention has found a process for achieving sub-micron control of an optical waveguiding layer thickness by providing a dimensionally stable wafer assembly into which adhesive can be introduced without altering the planar relationship between a carrier wafer and an optically transmissive wafer in wafer scale manufacture. This process permits wafer scale manufacture of optical waveguide devices including thin optically transmissive layers. A pattern of spacer pedestals is created by a deposition and etch back, or by a surface etch process to precisely reference surface information from a master surface to a carrier wafer to a thin optically transmissive wafer. The tolerance achievable in accordance with this process provides consistent yield across the wafer.

Wafer scale method of manufacturing optical waveguide devices and the waveguide devices made thereby

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North Granby, CT, United States of America

Julia Duncan