Hitachi Global Storage Technologies Netherlands B.v.

Hgst Netherlands, B.v.

Applied Materials, Inc.

Western Digital Technologies, Inc.

International Business Machines Corporation

Sandisk Technologies Inc.

Jui-lung Li

Quang Le

Marie-Claire Cyrille

Frederick Hayes Dill

Fred Conrad Redeker

Zvonimir Z Bandic

Xiaoyong Liu

Hongquan Jiang

Shijian Li

Shi-Ping Wang

David H Mai

Gary Lam

Jeffrey Scott Lille

Rajeev Bajaj

Kim Yang Lee

Neil Leslie Robertson

Jordan Asher Katine

Henry Hung Yang

Elizabeth Ann Dobisz

Scott Arthur MacDonald

Yongchul Ahn

Guangli Liu

Robert Fontana

Cherngye Hwang

David John Seagle

Edward Hin Pong Lee

Wipul Jayasekara

A David Erpelding

Yongqi Hu

Hamid Balamane

Kapila P Wijekoon

Michael Joseph Rooks

Sergio Nicoletti

Nian Xiang Sun

James Lamar Nix

Tony Kaushal

Christian Rene Bonhote

Hicham Moulay Sougrati

Shin Funada

Rahul Surana

Yongsik Moon

Son Van Nguyen

Daniele Mauri

Kuok San Ho

Jeffrey Childress

Aron Pentek

Yi Zheng

Liubo Hong

Ching Hwa Tsang

Chando Park

Yimin Hsu

Petrus Antonius Van Der Heijden

Hugo Alberto Emilio Santini

Yang Li

Howard Gordon Zolla

Patrick Braganca

Sue Siyang Zhang

Chun-Ming Wang

Jyh-Shuey Jerry Lo

Satoru Araki

Robert Beach

Yuchun Wang

Ning Shi

Mason Lamar Williams

Amanda Baer

Thomas Dudley Boone, Jr

David Patrick Druist

Goran Mihajlovic

Ian Robson McFadyen

Honglin Zhu

Samuel Weisan Yuan

Chang-Man Park

Tiffany Santos

Kanaiyalal Patel

Thomas L Leong

Juraj Topolancik

Thomas William Clinton

Xhavin Sinha

Yvette Chung Nga Winton

Benjamin Lu Chen Wang

Wipul Pemsiri Jayaekara

Aron Peniek

A magnetic recording write head includes a spin torque oscillator (STO) between a seed layer disposed on a write pole and trailing shield. The seed layer has a cross-track width greater than the width of the STO and a depth in a direction orthogonal to the disk-facing surface of the write pole greater than the depth of the STO. A first insulating refill layer is formed on the sides of the seed layer and STO, and a second insulating refill layer in contact with the first refill layer has a thermal conductivity greater than that of the first refill layer. When current is passing through the STO, the seed layer spreads the current to reduce heating of the write pole and STO, and the bilayer refill material facilitates the transfer of heat away from the write pole and STO.

Magnetic recording write head with spin-torque oscillator (STO) and extended seed layer

Magnetic sensors with effectively shaped side shields and their fabrication processes are provided. One such process includes depositing sensor materials on a substrate, shaping the sensor materials to form a stripe height of the magnetic sensor, shaping the sensor materials to form a track width of the magnetic sensor, depositing side shield materials on the shaped sensor materials, shaping the side shield materials such that a resulting side shield extends further than the stripe height, depositing an insulator layer on the shaped side shield materials, and shaping the insulator layer.

Magnetic sensors with effectively shaped side shields

A perpendicular spin transfer torque MRAM memory cell includes a magnetic tunnel junction that has a free layer, a pinned layer and a tunnel barrier between the free layer and the pinned layer. The free layer has a switchable direction of magnetization perpendicular to the plane of the free layer. A cap layer is provided adjacent to the magnetic tunnel junction. The thickness of the cap layer is increased so that the cap layer acts as a heating layer, which results in a reduction of the current density during writing and increases the write margin. In some embodiments, a resistive heating layer is added to the memory cell, adjacent to the cap layer, in order to achieve the lower current density and increased write margin while also improving signal to noise ration during reading by eliminating shot noise.

Perpendicular spin transfer torque MRAM memory cell with cap layer to achieve lower current density and increased write margin

Magnetic sensors using spin Hall effect and methods for fabricating same are provided. One such magnetic sensor includes a spin Hall layer including an electrically conductive, non-magnetic material, a magnetic free layer adjacent to the spin Hall layer, a pair of push terminals configured to enable an electrical current to pass through the magnetic free layer and the spin Hall layer in a direction that is perpendicular to a plane of the free and spin Hall layers, and a pair of sensing terminals configured to sense a voltage when the electrical current passes through the magnetic free layer and the spin Hall layer, where each of the push and sensing terminals is electrically isolated from the other terminals.

Magnetic sensor using spin hall effect

A magnetic recording write head includes a spin torque oscillator (STO) between the write pole and trailing shield and an extended seed layer on the write pole beneath the STO. The seed layer has a cross-track width greater than the width of the STO and a depth in a direction orthogonal to the disk-facing surface of the write pole greater than the depth of the STO. A first insulating refill layer is formed on the sides of the extended seed layer and STO and a second insulating refill layer in contact with the first refill layer has a thermal conductivity greater than that of the first refill layer. When current is passing through the STO the extended seed layer spreads the current to reduce heating of the write pole and STO and the bilayer refill material facilitates the transfer of heat away from the write pole and STO.

Magnetic sensors with effectively shaped side shields and their fabrication processes are provided. One such sensor includes a substrate, a sensor stack disposed on the substrate and having a stripe height, where the sensor stack further includes a front edge disposed at an air bearing surface (ABS) of the magnetic sensor, a back edge opposite of the front edge, and two side edges, and a side shield adjacent to each of the two side edges of the sensor stack, each side shield having a side shield height defined as a distance from the ABS to a back edge of the side shields, where the side shield height is greater than the stripe height, and where substantially no residue from materials used to form the side shield are disposed at the back edge of the sensor stack.

The embodiments disclosed herein generally relate to a HAMR head in which the SSC is fabricated adjacent the NFT where the SSC is formed on a substrate that has been protected from NFT fabrication processing conditions. As such, the substrate remains smooth so that the SSC formed thereover, is not negatively impacted by the NFT process conditions.

Sacrificial protection layer for preventing ion mill damage to HAMR optical components

A method for manufacturing a magnetic sensor using an electrical lapping guide deposited and patterned simultaneously with a hard bias structure of the sensor material. The method includes depositing a sensor material, and patterning and ion milling the sensor material to define a track width of the sensor. A magnetic, hard bias material is then deposited and a second patterning and ion milling process is performed to simultaneously define the back edge of an electrical lapping guide and a back edge of the sensor.

Method for manufacturing a magnetoresistive sensor using simultaneously formed hard bias and electrical lapping guide

A magnetic write head for data recording having a magnetic write pole with a stepped magnetic shell structure that defines a secondary flare point. The secondary flare point defined by the magnetic shell portion can be more tightly controlled with respect to its distance from the air bearing surface (ABS) of the write head than can a traditional flare point that is photolithographically on the main pole structure. This allows the effective flare point of the write head to be moved much closer to the ABS than would otherwise be possible using currently available tooling and photolithography techniques. The write head may also include a magnetic trailing shield that wraps around the main pole portion. The trailing shield can have a hack edge defining a trailing shield throat height that is either between the secondary flare point or coincident or behind the secondary flare point, depending on design requirements.

Perpendicular write head having a stepped flare structure and method of manufacture thereof

A method for manufacturing a magnetic read sensor at very narrow track widths. The method uses an amorphous carbon mask layer to pattern the sensor by ion milling, rather than a mask constructed of a material such as photoresist or DURIMIDE&#xae; which can bend over during ion milling at very narrow track widths. By using the amorphous carbon layer as the masking layer, the trackwidth can be very small, while avoiding this bending over of the mask that has been experienced with prior art methods. In addition, the track-width can be further reduced by using a reactive ion etching to further reduce the width of the amorphous carbon mask prior to patterning the sensor. The method also allows extraneous portions of the side insulation layer and hard bias layer to be removed above the sensor by a light CMP process.

Method for manufacturing a magnetic read sensor with narrow track width using amorphous carbon as a hard mask and localized CMP

Embodiments herein generally relate to TMR readers and methods for their manufacture. The embodiments discussed herein disclose TMR readers that utilize a structure that avoids use of the DLC layer over the sensor structure and over the hard bias layer. The capping structure over the sensor structure functions as both a protective layer for the sensor structure and a CMP stop layer. The hard bias capping structure functions as both a protective structure for the hard bias layer and as a CMP stop layer. The capping structures that are free of DLC reduce the formation of notches in the second shield layer so that second shield layer is substantially flat.

TMR reader without DLC capping structure

A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.

Planarization methods for patterned media disks

A method for manufacturing a magnetoresistive sensor that results in the sensor having a very flat top magnetic shield. The process involves depositing a plurality of sensor layers and then depositing a thin high density carbon CMP stop layer over the sensor layers and forming a mask over the CMP stop layer. An ion milling is performed to define the sensor. Then a thin insulating layer and magnetic hard bias layer are deposited. A chemical mechanical polishing is performed to remove the mask and a reactive ion etching is performed to remove the remaining carbon CMP stop layer. Because the CMP stop layer is very dense and hard, it can be made very thin. This means that when it is removed by reactive ion etching, there is very little notching over the sensor, thereby allowing the upper shield to be very thin.

Method for manufacturing a magnetoresistive sensor having a flat shield

Embodiments of the invention operate to narrow the track width of a read head used in a disk drive. In one embodiment, a magnetic read head has a track width of about 40 nm or less. The read head is fabricated by a method that includes fabricating a film stack from a substrate, a sensor material, a stop material, a first release material, a mask material, and a photo resist material. The mask material may include a masking substrate material and a second release material. The film stack is processed by forming a read head image in the photo resist material, removing portions of the film stack that lie outside the read head image of the photo resist material, stripping the film stack to remove the photo resist, mask and first release materials, and milling the sensor material according to the read head image.

Manufacturing a narrow track read head

A three terminal magnetic sensing device (TTM) having a trackwidth defined in a localized region by a patterned insulator, and methods of making the same, are disclosed. In one illustrative example, one or more first sensor layers (e.g. which includes a 'base' layer) are formed over a collector substrate. A patterned insulator which defines a central opening exposing a top layer of the one or more first sensor layers is then formed. The central opening has a width for defining a trackwidth (TW) of the TTM. Next, one or more second sensor layers are formed over the top layer of the one or more first sensor layers through the central opening of the patterned insulator. The one or more second sensor layers may include a tunnel barrier layer formed in contact with the top layer of the one or more first sensor layers, as well as an 'emitter' layer. Various embodiments and techniques are provided.

Three terminal magnetic sensing device having a track width defined in a localized region by a patterned insulator and methods of making the same

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San Jose, CA, United States of America

Jui-lung Li