Vanguard International Semiconductor Corporation

Jui-Chun Chang

Hsiung-Shih Chang

Shang-Hui Tu

Tsung-Hsiung Lee

Chih-Jen Huang

Chia-Hao Lee

Shin-Cheng Lin

Wen-Hsin Lin

Yu-Hao Ho

Manoj Kumar

Li-Che Chen

Pei-Heng Hung

Yeh-Ning Jou

Geeng-Lih Lin

Kwang-Ming Lin

Chen-Wei Wu

Chih-Cherng Liao

Hung-Shern Tsai

Shih-Hao Liu

Wu-Hsi Lu

Ming-Cheng Lo

Yu-Che Tsai

Priyono Tri Sulistyanto

Chia-Ming Hsu

Li-Yang Hong

Yen-Shih Ho

Bo-Yuan Su

Fu-Chun Tseng

Yu-Ping Ho

Shanghui L Tu

Shih-Chang Huang

Yi-Ching Chung

Chien-Nan Liao

Shih-Kai Wu

Cheng-Yu Wang

A method of fabricating a semiconductor device includes providing a substrate that includes a handle substrate, a bottom cladding layer, and a semiconductor layer stacked in sequence from bottom to top. The substrate includes an electronic integrated circuit (EIC) region and a photonic integrated circuit (PIC) region. A thermal oxidation process is performed on the semiconductor layer in the PIC region to form an oxide layer. A first thickness of the semiconductor layer in the EIC region is greater than a second thickness of the semiconductor layer below the oxide layer. The oxide layer is removed and a PIC structure is formed on the bottom cladding layer in the PIC region. An EIC structure is formed on the bottom cladding layer in the EIC region. An interconnect structure is formed to be electrically connected to the PIC and EIC structures.

Semiconductor device and fabrication method thereof

A semiconductor device is provided. The semiconductor device includes a substrate, a first well, a second well, an isolation structure, a first field plate, a gate structure, a drain structure, and a source structure. The first well and the second well adjoin each other. The first well and the second well are disposed in the substrate. The isolation structure is disposed on the first well. The first field plate is disposed on the isolation structure. The gate structure crosses the first well and the second well, and an opening is defined between the first field plate and the gate structure to expose an edge of the isolation structure adjacent to the gate structure. The drain structure is disposed in the first well. The source structure is disposed in the second well.

Semiconductor device

A semiconductor device includes a charge-absorbing structure disposed over a substrate; an insulating layer disposed over the charge-absorbing structure; a semiconductor layer disposed over the insulating layer; a plurality of first doped regions and a plurality of second doped regions disposed in the semiconductor layer, wherein the first doped regions and second doped regions extend in a first direction and are alternately arranged along a second direction that is different than the first direction, and the plurality of first doped regions and the plurality of second doped regions have different conductivity types; a source and a drain disposed respectively on opposite sides of the plurality of first doped regions and the plurality of second doped regions and extend in the second direction; and a gate disposed on the plurality of first doped regions and the plurality of second doped regions and extends in the second direction.

Semiconductor devices having charge-absorbing structure disposed over substrate and methods for forming the semiconductor devices

A semiconductor device is provided. The device includes a substrate having a first conductivity type. The device further includes a drain region, a source region, and a well region disposed in the substrate. The well region is disposed between the drain region and the source region and having a second conductivity type opposite to the first conductivity type. The device further includes a plurality of doped regions disposed within the well region. The doped regions are vertically and horizontally offset from each other. Each of the doped regions includes a lower portion having the first conductivity type, and an upper portion stacked on the lower region and having the second conductivity type.

Method and apparatus for power device with multiple doped regions

A semiconductor device includes a substrate, a semiconductor layer, a doped region, a device region, a first isolation structure, a second isolation structure and a terminal. The semiconductor layer is disposed over the substrate. The doped region is disposed in the semiconductor layer. The device region is disposed on the doped region and includes a source, a drain and a gate. The first isolation structure is disposed in the semiconductor layer and surrounds the doped region. The second isolation structure surrounds the first isolation structure and is spaced apart from the first isolation structure. The terminal is disposed between the first isolation structure and the second isolation structure, and is equipotential with the source.

Semiconductor devices

A trench isolation structure is provided. The trench isolation structure includes a substrate. A polygonal trench is disposed in the substrate. An insulating material is disposed in the polygonal trench, and a polygon top-side contact structure is disposed in the polygonal trench and surrounded by the insulating material. The polygon top-side contact structure has the same shape as the polygonal trench from a top view. A method for forming the trench isolation structure is also provided.

Trench isolation structures and methods for forming the same

A method for manufacturing a semiconductor device includes forming a first well region in a semiconductor substrate, forming isolation structures on the semiconductor substrate, and forming second well regions and a third well region in the first well region, wherein the second well regions are isolated from the third well region by the isolation structures, and two of the adjacent second well regions have a first distance between them. The method also includes performing a rapid thermal annealing process to shorten the first distance to a second distance. The method further includes forming first barrier metal layers on the first well region and covering the second well regions, forming a second barrier metal layer on the first well region and covering the third well region, forming first electrodes on the first barrier metal layers, and forming a second electrode on the second barrier metal layer.

Schottky diode with dielectrically isolated diffusions, and method of manufacturing the same

A semiconductor device is provided. The semiconductor device includes a substrate; an epitaxial layer disposed over the substrate; a gate electrode disposed over the epitaxial layer; a source region and a drain region disposed in the epitaxial layer at opposite sides of the gate electrode; a trench extending from a top surface of the epitaxial layer through the source region into the epitaxial layer, wherein the trench has a slanted side and a bottom surface; and a first conductive-type linking region having the first conductive type, wherein the first conductive-type linking region surrounds the slanted side of the trench and contacts the bottom surface of the trench, wherein the first conductive-type linking region electrically connects the source region and the substrate. The present disclosure also provides a method for manufacturing this semiconductor device.

Semiconductor device with a trench and method for manufacturing the same

A semiconductor device including a substrate having an active region and a field-plate region therein is disclosed. At least one trench-gate structure is in the substrate. The field-plate region is at a first side of the trench-gate structure. At least one source doped region is in the substrate at a second side opposite to the first side of the trench-gate structure. The source doped region adjoins the sidewall of the trench-gate structure. A drain doped region is in the substrate corresponding to the active region. The field-plate region is between the drain doped region and the trench-gate structure. An extending direction of length of the trench-gate structure is perpendicular to that of the drain doped region as viewed from a top-view perspective.

Trench-gate semiconductor device and method for forming the same

A semiconductor device is disclosed. The device includes an epitaxial layer on a substrate, wherein the epitaxial layer includes first trenches and second trenches alternately arranged along a first direction. The epitaxial layer between the adjacent first and second trenches includes a first doping region and a second doping region, and the first doping region and the second doping region have different conductivity types. An interface is between the first doping region and the second doping region to form a super-junction structure. A gate structure is on the epitaxial layer. The epitaxial layer under the gate structure includes a channel extending along a second direction, and the first direction is perpendicular to the second direction.

Method for forming semiconductor device having super-junction structures

The invention provides a semiconductor device. The semiconductor device includes a buried oxide layer disposed on a substrate. A semiconductor layer having a first conduction type is disposed on the buried oxide layer. A first well doped region having a second conduction type is disposed in the semiconductor layer. A cathode doped region having the second conduction type is disposed in the first well doped region. A first anode doped region having the first conduction type is disposed in the first well doped region, separated from the cathode doped region. A first distance from a bottom boundary of the first anode doped region to a top surface of the semiconductor layer is greater than a second distance from the bottom boundary to an interface between the semiconductor layer and the buried oxide layer.

A lateral double diffused metal-oxide-semiconductor device includes: an epitaxial semiconductor layer disposed over a semiconductor substrate; a gate dielectric layer disposed over the epitaxial semiconductor layer; a gate stack disposed over the gate dielectric layer; a first doped region disposed in the epitaxial semiconductor layer from a first side of the gate stack; a second doped region disposed in the epitaxial semiconductor layer from a second side of the gate stack; a third doped region disposed in the first doping region; a fourth doped region disposed in the second doped region; an insulating layer covering the third doped region, the gate dielectric layer, and the gate stack; a conductive contact disposed in the insulating layer, the third doped region, the first doped region and the epitaxial semiconductor layer; and a fifth doped region disposed in the epitaxial semiconductor layer under the conductive contact.

Lateral double diffused metal-oxide-semiconductor device and method for fabricating the same

A vertical diode is provided. The vertical diode includes a high-voltage N-type well region in a substrate, and two P-doped regions spaced apart from each other in the high-voltage N-type well region. The vertical diode also includes an N-type well region in the high-voltage N-type well region, and an N-type heavily doped region in the N-type well region. A plurality of isolation structures are formed on the substrate to define an anode region and a cathode region. There is a bottom N-type implanted region under the high-voltage N-type well region corresponding to the anode region. The bottom N-type implanted region directly contacts or partially overlaps the high-voltage N-type well region. A method for fabricating a vertical diode is also provided.

Growing community of inventors

Hsinchu, Taiwan

Jui-Chun Chang