Unaxis-balzers Aktiengesellschaft

Juergen Ramm

Alex Dommann

Christoph Benno Luechinger-Bautista

Heinrich Zimmerman

Nicolino Onda

Eugen Beck

A method is disclosed for manufacturing parts with intimate connection of least two material phases, of which at least one is a solid body phase. Prior to intimate connection, at least the surface of the solid body phase to be connected is pretreated by a plasma-activated gas that contains nitrogen. The method is used, for example, for connecting integrated circuits with an HLST or for the electrical connection of the printed circuits by wire bonding or for the sheathing of electrical circuits joined with HLST and connected by wire bonding, with a potting compound. A workpiece stored in air is characterized by a surface exposed to the air, by contrast with a surface of the workpiece produced directly, having an elevated nitrogen concentration, detectable for example by a &ldquo;Fourier transform infrared spectroscopy&rdquo; with &ldquo;attenuated total reflection&rdquo; FTIR-ATR and/or with &ldquo;nuclear reaction analysis,&rdquo; NRA and/or with &ldquo;time of flight secondary ion mass spectrometry,&rdquo; TO-SIMS. Also disclosed is a vacuum processing chamber with a plasma discharge section, a gas supply to the chamber, connected with a gas tank arrangement, as well as with a workpiece holding device. The gas tank arrangement contains a gas with nitrogen and the holding arrangement has at least one access slit open to the discharge chamber for a disk-shaped or plate-shaped workpiece.

Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber

A method uses a treatment process for surfaces which subsequently are to be connected by bonding, gluing or molding. The surfaces are exposed to an atmosphere with activated hydrogen. The connection is made a process step for eliminating the conservation treatment. The surfaces can be subjected to a plasma discharge in an atmosphere containing hydrogen. The plasma discharge is operated by a cathode/anode path as a DC discharge, and using a thermionic cathode as the cathode. The workpiece to be stored in air comprises a connection, which by gluing, bonding or molding, is subjectable to substantially higher stress than an identical workpiece which is stored in an identical manner, this being determinable by essentially identical Auger diagrams.

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Sevelen, Switzerland

Juergen Ramm