Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Juergen Kruckow

Martin Richter

Martin Wackerle

Sebastian Kibler

Karl Neumeier

Dieter Bollmann

Henry Leistner

Klaus Heinrich

Stefan Seitz

Leonhard Hoefter

A method for manufacturing at least one micromechanical device includes: Further embodiments relate to a valve manufactured by means of the method and to a micromechanical pump.

Method for manufacturing a micromechanical device and micromechanical valve

A fluid sample dispenser includes a microdosing device for outputting, during an activation state, a fluid sample at a fluid sample outlet to the environment, wherein the microdosing device is placeable adjacent to a person's nose so that a distance between the outlet of the microdosing device and a nostril of the person's nose is within a predefined range, and a microdosing driver unit for adjusting a dosing rate of the scent sample output at the scent sample outlet by selectively activating the microdosing device.

Controllable fluid sample dispenser and methods using the same

A test station for testing at least one of fluidic component arranged on a substrate, each fluidic component having a fluidic port, comprises a carrier device for holding the substrate with the at least one fluidic component, a connecting device for fluidically connecting the fluidic port of the at least one fluidic component located in a testing position to a first adapter element of the connecting device, and a displacement device configured to displace the substrate and the connecting device relative to each other, and to bring the substrate into the testing position.

Test station and method for testing fluidic components

A pump has an inlet opening, an outlet opening, a pump diaphragm comprising an opening, provided with a passive check valve, through the pump diaphragm, and an actuator configured to move the pump diaphragm between a first position and a second position. The passive check valve is configured such that a movement from the first position in the direction toward the second position has a closing effect, and that a movement from the second position in the direction toward the first position has an opening effect, so that a pumping cycle wherein the pump diaphragm is moved from the first to the second positions, and back, causes a net flow from the inlet opening to the outlet opening.

Pump, pump arrangement and pump module

A pump arrangement includes a pump having a pump inlet and a pump outlet, and a safety valve arranged between the pump outlet and an outlet of the pump arrangement and having a valve seat and a valve lid. The valve seat, the pump outlet and the pump inlet are patterned in a first surface of a first integrated part of the pump arrangement, whereas the valve lid is formed in a second integrated part of the pump arrangement. An inlet of the pump arrangement and a fluid region fluidically connected thereto are formed in a third part of the pump arrangement. The second integrated part is arranged between the first integrated part and the third part of the pump arrangement such that a pressure in the fluid region has a closing effect on the safety valve, the pump inlet and the inlet of the pump arrangement being connected fluidically.

Pump arrangement comprising a safety valve

A normally closed microvalve includes a fluid inlet, a fluid outlet, a deflectable closing element, which, in the closed state of the microvalve, is seated on a sealing lip, such that the fluid inlet is fluidically disconnected from the fluid outlet, and in the opened state of the microvalve, is spaced apart from the sealing lip, and a deflectable holding structure which is connected to the closing element such that, between the same, a space exists, which is in fluidic communication to the fluid outlet. An influence of a force onto the holding structure and the closing element in a first direction provides an opening-action to the microvalve, while an influence of a force onto the holding structure and the closing element in a second direction provides a closing-action. The fluid inlet and the closing element are arranged such that a pressure at the fluid inlet exerts a force in the second direction. An effective surface of the holding structure, which, when a pressure is applied to the fluid outlet, causes a force in the second direction, is greater than an effective surface of the closing element, which, when a pressure is applied to the fluid outlet, causes a force in the first direction.

Normally double-closed microvalve

In a method of producing a micromechanical structure for a micro-electromechanical element, a first intermediate layer, which is applied to a first main surface of a first semiconductor wafer, is structured in a first step so as to produce a recess. The first semiconductor wafer is then connected via the first intermediate layer to a second semiconductor wafer in such a way that a hermetically sealed cavity is defined by the recess. Finally, one of the wafers is thinned from a surface facing away from said first intermediate layer so as to produce a diaphragm-like structure on top of the cavity. At least one further intermediate layer is provided between the two semiconductor wavers which, prior to the connection of the two semiconductor wafers, is structured in such a way that the structure formed in said at least one further intermediate layer and the recess in said first intermediate layer define the cavity.

Growing community of inventors

Munich, Germany

Juergen Kruckow