Koninklijke Philips Corporation N.v.

Juergen Klein

Michael Loeken

Jakob Willi Neff

Sven Probst

The present invention relates to a method of operating an electrical discharge device () comprising at least one first electrode () and at least one second electrode () at a distance therefrom, which electrodes are electrically connected to a power supply () and, upon ignition of a first gas discharge () between the electrodes (), transmit an electrical current (I), as a result of which a plasma () is produced in a working gas (), which plasma emits radiation (), in particular extreme ultraviolet and/or soft X-ray radiation, which is passed via a solid angle () into a chamber () outside the electrodes (). In order to prevent erosion at the electrodes (), it is proposed that the formation of a secondary plasma () in the chamber () is suppressed by a device ().

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Aachen, Germany

Juergen Klein