Carl Zeiss Microscopy Gmbh

Carl Zeiss Microelectric Systems Gmbh

Juergen Heise

Ralf Wolleschensky

Matthias Burkhardt

Wolfgang Harnisch

Karlheinz Bartzke

Thomas Engel

Heinrich Klose

Device to adjust the position and/or size of a pinhole in a laser scanning microscope (LSM) where the pinhole is illuminated via a separate light source or the LSM laser and the pinhole is moved at a right angle to the optical axis until the receiver has the maximum intensity and the pinhole position is captured and saved together with the data attributed to the replaceable optical components.

Device for the reproducible adjustment of a pin hole opening and pin hole position in laser scanning microscopes using a reflector

The invention is directed to a device for flat illumination of an object field in an optical instrument and to an optical instrument with a device of this kind. Optical instruments of this type are, for example, microscopes, including microlithography simulation microscopes in which a flat illumination, i.e., illumination extending beyond a singular object point, of the object to be examined is required. The device comprises a laser light source and a light-conducting cable with at least one optical fiber through which the light from the laser light source is guided to the object field. The optical fiber is constructed and dimensioned in such a way that the intensity of the illumination light within the cross section of the optical fiber becomes increasingly more uniform along the path from the input-side end to the output-side end, and the illumination light is directed from the output-side end of the optical fiber to the object with substantially homogeneous intensity distribution.

Device for flat illumination of an object field

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Jena, Germany

Juergen Heise