Hoechst Aktiengesellschaft

Clariant Corporation

Juergen Fuchs

Georg Pawlowski

Horst Roeschert

Ralph R Dammel

Peter Wilharm

Gerhard Buhr

Hans-Joachim Merrem

Walter Spiess

Charlotte Eckes

A negative-working radiation-sensitive mixture containing

Negative-working radiation-sensitive mixture, and radiation-sensitive

Radiation-sensitive polymers, a mixture containing these radiation-sensitive polymers as binder, and a process for the preparation of the radiation-sensitive polymer binders are disclosed. A positive radiation-sensitive recording material containing the radiation-sensitive polymer is also disclosed.

Radiation-sensitive polymers containing diazocarbonyl groups and a

A 2,4,6-tris-(2-hydroxyethoxy)-[1,3,5]triazine esterified with two or three arylsulfonic acids or heteroarylsulfonic acids is useful to prepare a positive-working radiation-sensitive mixture which is distinguished by a high resolution and a high sensitivity over a wide spectral range. It also shows high thermal stability and does not form corrosive photolysis products on exposure. A radiation-sensitive recording material which is produced from these esters is suitable for producing photoresists, electronic components, printing plates or for chemical milling.

Positive-working radiation sensitive mixture comprising sulfonic acid

A radiation-sensitive polymer and a mixture containing this radiation-sensitive polymer as a binder are disclosed. A process for the preparation of the radiation-sensitive polymer binder and a positive-working radiation-sensitive recording material which is prepared using the radiation-sensitive mixture are also disclosed.

Radiation-sensitive polymers containing

A silylated polymeric binder, which is soluble or swellable in alkali, bears a plurality of at least one of aliphatic and aromatic hydroxyl groups, at least a portion of which are derivatized by units of the formulae I and II:

Binders soluble in aqueous alkali and containing silanyl groups in the

A silylation reagent is useful for preparing binders which are soluble in aqueous alkali and contain silanyl groups in the side chain, comprises a compound having the formula I

Silylation reagents for preparing binders which are soluble in aqueous

A silylated polymeric binder, which is soluble or swellable in alkali, bears a plurality of at least one of aliphatic and aromatic hydroxyl groups, at least a portion of which are derivatized by units of the formula I and II:

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Wicker, Germany

Juergen Fuchs