Basf Coatings Gmbh

Juergen Frank

Maraike Ahlf

Stephan Klotz

Torben Adermann

Myung Mo Sung

Felix Eickemeyer

Daniel Loeffler

Kwan Hyuck Yoon

The present invention is in the field of processes for producing flexible organic-inorganic laminates as well as barrier films comprising flexible organic-inorganic laminates by atomic layer deposition. In particular the present invention relates to a process for producing a laminate comprising more than once the sequence comprising: (a) depositing an inorganic layer by performing 4 to 150 cycles of an atomic layer deposition process, and (b) depositing an organic layer comprising sulfur by a molecular layer deposition process.

Process for producing flexible organic-inorganic laminates

Processes for producing flexible organic-inorganic laminates are described herein. In particular, a process is provided for producing a laminate comprising at least twice a sequence comprising (a) depositing an inorganic layer by performing 3 to 150 cycles of an atomic layer deposition process, and (b) depositing an organic layer comprising nitrogen by performing 1 to 3 cycles of a molecular layer deposition process.

Processes for producing flexible organic-inorganic laminates by atomic layer deposition are described, as well as barrier films comprising flexible organic-inorganic laminates. In particular, a process for producing a laminate including (a) depositing an inorganic layer by an atomic layer deposition process, and (b) depositing an organic layer comprising selenium by a molecular layer deposition process is provided.

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Ludwigshafen, Germany

Juergen Frank