Samsung Electronics Co., Ltd.

Jubong Lee

Sung Yong Park

Hoseop Choi

Kyoungwhan Oh

Ansook Sul

Minseop Park

Kiju Sohn

Jaeyoung Eom

An apparatus for cleaning a bowl includes a base plate, and a blade coupled to the base plate. The blade extends in a curve on a surface of the base plate in a direction receding from a center of the base plate in a plan view. An inner side surface of the blade includes a curved surface concavely recessed toward an inside of the blade in a cross-sectional view taken along a direction perpendicular to an extending direction of the blade.

Apparatus for cleaning a bowl and a photoresist (PR) coating system including the same

A conditioning disk replacement apparatus includes; a detacher configured to separate a conditioning disk from to a holder, a transfer part configured to transfer the conditioning disk, and a container configured to store the conditioning disk. The detacher includes a detachment body and a rotary part coupled to the detachment body, the rotary part includes a key protruding outward from the rotary part in a first horizontal direction, and the rotary part is configured to rotate about a central axis extending in the first horizontal direction.

Conditioning disk replacement apparatus and method

Growing community of inventors

Hwaseong-si, South Korea

Jubong Lee