Purdue Research Foundation

Juan Zeng

Dimitrios Peroulis

Zhengan Yang

A cavity resonator tuning diaphragm comprising a plurality of inner corrugations, the plurality of inner corrugations having a first depth. An outer corrugation located between the plurality of inner corrugations and a perimeter of the diaphragm is also included, the outer corrugation having a second depth greater than the first depth. The addition of the outer deep corrugation provides increased thermal stability and reduced required actuation voltage.

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West Lafayette, IN, United States of America

Juan Zeng