Asml Netherlands B.v.

Juan Manuel Gonzalez Huesca

Johan Gertrudis Cornelis Kunnen

Maxim Pisarenco

Frederik Eduard De Jong

Willem Richard Pongers

Chung-Hsun Li

Johan Franciscus Maria Beckers

Georgios Tsirogiannis

Dylan John David Davies

Hendrik Cornelis Anton Borger

Arnaud Hubaux

Ajinkya Ravindra Daware

Andriy Hlod

Alexander Ypma

Dimitra Gkorou

Reza Sahraeian

Carlo Lancia

Eleftherios Koulierakis

A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.

Method for decision making in a semiconductor manufacturing process

A method for determining an inspection strategy for at least one substrate, the method including: quantifying, using a prediction model, a compliance metric value for a compliance metric relating to a prediction of compliance with a quality requirement based on one or both of pre-processing data associated with the substrate and any available post-processing data associated with the at least one substrate; and deciding on an inspection strategy for the at least one substrate, based on the compliance metric value, an expected cost associated with the inspection strategy and at least one objective value describing an expected value of the inspection strategy in terms of at least one objective relating to the prediction model.

Method for determining an inspection strategy for a group of substrates in a semiconductor manufacturing process

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Eindhoven, Netherlands

Juan Manuel Gonzalez Huesca