Carl Zeiss Smt Gmbh

Carl Zeiss X-ray Microscopy, Inc.

Juan Atkinson Mora

Heiko Feldmann

Johannes Ruoff

Thomas Anthony Case

Christoph Hilmar Graf Vom Hagen

Thomas Matthew Gregorich

Gerhard Krampert

A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane. A control device has a drive control unit, which is in signal connection with the shield stop displacement drive and with the object displacement drive for synchronizing a movement of the shield stop displacement drive and the object displacement drive. The result is an optimization of an X-ray illumination of the object to achieve a high-resolution object imaging.

Detection system for X-ray inspection of an object

Growing community of inventors

Hillsboro, OR, United States of America

Juan Atkinson Mora