Skhynix Inc.

Ju Ry Song

Hyangkeun Yoo

Se Ho Lee

Jae Gil Lee

Jung Hyung Lee

Sarohan Park

Sang Hee Jung

Hae Ri Kim

Tae Jun You

Ji Young Im

A nonvolatile memory device according to an embodiment includes a substrate, a channel structure extending in a direction perpendicular to the substrate; a charge storage structure disposed to be in contact with the channel structure; and a cell electrode structure disposed to be in contact with the charge storage structure in a lateral direction, wherein the channel structure comprises a hole conduction layer and an electron conduction layer.

Nonvolatile memory device having multiple numbers of channel layers

In a method of forming patterns, first and second upper reverse patterns are formed on a lower reverse layer. A buffer layer is formed to fill first opening portions provided by the first upper reverse pattern. A shield pattern is formed to cover a second region of the buffer layer. An etching process is performed using the shield pattern and the first upper reverse pattern as an etching mask to form first lower reverse patterns providing second openings overlapping first openings, a buffer layer pattern and a second lower reverse pattern overlapping the shield pattern. A hard mask layer is formed and etched to separate hard mask layer first patterns filling the first and second openings. An etching process is performed using the hard mask layer first patterns and the second upper reverse patterns as etching masks to form third lower reverse patterns overlapping the second upper reverse pattern.

Method of forming patterns using reverse patterns

In a method, a stack structure including a plurality of first interlayer sacrificial layers and a plurality of second interlayer sacrificial layers that are alternately stacked is formed over a substrate. A trench penetrating the stack structure is formed. A channel layer covering a sidewall surface of the trench is formed. The plurality of first interlayer sacrificial layers are selectively removed to form a plurality of first recesses. The plurality of first recesses are filled with a conductive material to form a plurality of channel contact electrode layers. The plurality of second interlayer sacrificial layers are selectively removed to form a plurality of second recesses. A plurality of interfacial insulation layers, a plurality of ferroelectric layers and a plurality of gate electrode layers are formed in the plurality of second recesses.

Method of fabricating vertical memory device

A nonvolatile memory device according to an embodiment includes a substrate, a cell electrode structure disposed on the substrate and including interlayer insulating layers and gate electrode layers that are alternately stacked, a trench penetrating the cell structure on the substrate, a charge storage structure disposed on a sidewall surface of the trench, and a channel structure disposed adjacent to the charge storage structure and extending in a direction parallel to the sidewall surface. The channel structure includes a separate hole conduction layer and an adjacent and separate electron conduction layer. A control channel layer disposed on a control dielectric layer is a portion of the electron conduction layer configured to electrically connect to the channel structure, and to the charge storage structure. A control dielectric layer and a charge barrier layer are discrete but contiguous from the control channel structure to the charge storage structure.

A semiconductor device having a three-dimensional structure is disclosed herein. The semiconductor device includes a substrate. a first electrode line that extends in a first direction perpendicular to the substrate, a device pattern that extends from the first electrode line in a second direction parallel to the substrate, and a second electrode line connected to the device pattern. The device pattern may comprise at least one semiconductor layer pattern, where the at least one semiconductor layer pattern comprises an n-type dopant or a p-type dopant.

Semiconductor device having three-dimensional structure and method of manufacturing the same

A vertical memory device according to an aspect includes a substrate, a first gate electrode structure disposed on the substrate and a second gate electrode structure spaced apart from the first gate electrode structure in a first direction substantially perpendicular to the substrate, a channel contact electrode layer disposed between the first gate electrode structure and the second gate electrode structure, and a channel layer extending along the first direction and in contact with the channel contact electrode layers and the first and the second gate electrode structures.

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Suwon-si, South Korea

Ju Ry Song