Taiwan Semiconductor Manufacturing Comp. Ltd.

Ju-Kau Chen

Gwo-Chiang Fang

Chao-Fan Chang

Ming-Feng Ou

Oliver Wu

Amy Chen

Wen-Pin Wu

Rebecca Hsu

Meng-Chao Huang

Chih-Jen Pan

A manufacturing process control system comprises a process controller and an order manager coupled to a network. When receiving an order for a batch of lots requiring a manufacturing process by a manufacturing entity, the order manager automatically provides an electronic list comprising entries corresponding to stages of the manufacturing process, at which processing of the lots can be held. When order manager receives designation of a first entry on the list through the network, the process controller monitors the lots while the lots are being processed in the manufacturing entity, and automatically directs at least one lot to be held before processing thereof at a stage to which the first entry corresponds.

Manufacturing process control methods and systems

Computer-implemented wafer-based planning methods for batch-based processing tools. Tool groups are appended in a tool group level of planning data provided by a MES for converting planning data from batch-based to wafer-based data. The planning data with appended tool group is applied to dispatch processing tools.

Wafer-based planning methods and systems for batch-based processing tools

A backup planning device within a fabrication system. The backup planning device schedules backup operations between separately located fabrication facilities by introducing a virtual tool. The capacity of the virtual tool is combined into first capacity information of a tool group to generate second capacity information thereof accordingly. The first capacity information comprises capacity information of effective tools in the respective tool group, while the second capacity information comprises capacity information of effective tools plus the virtual tool thereof. A first manufacturing plan for the tool group is determined according to a master production schedule, a WIP profile, and the second capacity information thereof. A second manufacturing plan is determined according to the workload allocation of the virtual tool in the first manufacturing plan.

System and method for fabrication backup planning

A method is provided for product culmination estimation in a microelectronics manufacturing environment. The method includes providing a manufacturing executing system including a plurality of processing entities. The manufacturing executing system provides interconnectivity and management of the processing entities. The method also assigns a standard queue time factor to product advancing through the manufacturing executing system, and determines an actual and theoretical cycle time and associated with the product through each process entity of the manufacturing executing system. The method further includes anticipating a target queue time for the product through the manufacturing executing system, and forecasting product cycle time of the product through the manufacturing executing system.

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Changhua, Taiwan

Ju-Kau Chen