Other

Accretech USA, Inc.

Ju Jin

Satish Sadam

Paul Forderhase

Siming Lin

Michael D Robbins

Vishal Verma

Zhiyan Huang

An auto focus method for passive auto focus systems consists of an image acquisition and processing engine, as well as an acutance index calculation engine. An auto focus method measures image's acutance index rather than image's contrast value. A passive auto focus system employing the auto focus method of the present invention can accurately and reliably detect the best focus point and thus preventing auto focus malfunction even under the condition that illumination uniformity changes dramatically.

Auto focus system and auto focus method

A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. The optic can be rotated radially relative to a center point of the substrate edge to allow for focused inspection of all surfaces of the substrate edge.

Automatic wafer edge inspection and review system

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Austin, TX, United States of America

Ju Jin