Hyundai Mobis Co., Ltd.

Wonik Ips Co., Ltd.

Ju Hwan Park

Byung Chul Cho

Dong Ho Ryu

Liu Wei

Wang Zhen

Yin Peng Xu

Provided is an audio-video-navigation (AVN) monitor drive unit for a vehicle, which is configured to tilt an AVN monitor coupled to a crash pad in a direction toward a passenger seat. The AVN monitor drive unit includes a monitor assembly, a hinge bracket slidably positioned at a rear of the monitor assembly, and a tilting portion configured to connect the monitor assembly and the hinge bracket to each other and tilt the monitor assembly from the hinge bracket.

AVN monitor drive unit for vehicle

Provided are a substrate treating apparatus and method of manufacturing a phase-change layer having superior deposition characteristics. The substrate treating method of manufacturing a phase-change memory includes forming a bottom electrode on a substrate on which a pattern is formed, performing surface treating for removing impurities generated or remaining on a surface of the substrate while the bottom electrode is formed, performing nitriding on the surface of the substrate from which the impurities are removed, and successively depositing a phase-change layer and a top electrode on the bottom electrode. The substrate treating apparatus for manufacturing a phase-change memory includes a load lock chamber into/from which a plurality of substrates are loaded or unloaded, the load lock chamber being converted between an atmosphere state and a vacuum state, a nitriding chamber in which nitriding is performed on a surface of a substrate on which a bottom electrode is disposed, the nitriding chamber being coupled to one side of a plurality of sides of the vacuum transfer chamber, and a process chamber in which a phase-change layer is deposited on the surface of the substrate on which nitriding is performed in the nitriding process chamber, the process chamber being coupled to one of the plurality of sides of the vacuum transfer chamber.

Apparatus and method for treating a substrate

Growing community of inventors

Hwaseong-si, South Korea

Ju Hwan Park