Electronics and Telecommunications Research Institute

Korea Telecommunication Authority

Ju-Heon Ahn

Kwang-Ryong Oh

Jeong-Soo Kim

Disclosed is a method for fabricating an optical integrated circuit capable of obtaining a current confinement and a maximum opto-coupling efficiency by using a simple process, in a case where an active device such as an optical waveguide and an optical amplifier. The method comprises a step for growing layers constituting the optical device over an InP substrate, a step for etching the grown layers by use of a wet etching method or a dry etching method of RIE along a plane perpendicular to a (001) plane, and a step for growing a core layer and a clad layer of the waveguide to be optically connected by use of a molecular organic chemical vapor deposition.

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Daejeon, South Korea

Ju-Heon Ahn