Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Technische Universitát Dresden

Laser-Laboratorium Göttingen E.v.

Jörg Heber

Thilo Sandner

Harald Schenk

Norbert Kaiser

Thomas Klose

Andreas Bergmann

Christian Gerwig

Thomas Knieling

Uwe Jan Schmidt

Alexandre Gatto

Minghong Yang

Matthias Roth

Klaus Janschek

Jürgen Ihlemann

Malte Schulz-Ruthenberg

A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.

Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device

The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.

Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof

Growing community of inventors

Dresden, Germany

Jörg Heber