Nxp B.v.

Jozef P W Stokkermans

Job Vianen

Theodorus Ter Steeg

Patrick J M Houben

Tom Kampschreur

A processing system and a method for processing a flexible substrate (e.g., a web) use a tensioner with a vacuum plate that can be moved along a transport direction of the flexible substrate with an indexer that intermittently moves the flexible substrate for processing. The tensioner and the indexer are controlled so that a relative speed between the indexer and the vacuum plate of the tensioner is maintained above a predefined threshold under all working conditions, even when the flexible substrate is stopped.

System and method for processing a flexible substrate

The present invention relates to an apparatus () for aligning an optical device with an object. The apparatus comprises, a frame (), a support unit () for supporting said optical device or said object and a transportation device () arranged to at least tilt the support unit in relation to the frame, wherein a segment of a sphere () is provided, which segment defines a spherical surface (), and the tilting movement of the support unit is controlled by said spherical surface. The apparatus according to the invention allows for a tilting movement between said optical device and said object, while such movement does not lead to a shift in focus. Furthermore the invention relates to an optical instrument and a semiconductor process system comprising said apparatus.

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Nijmegen, Netherlands

Jozef P W Stokkermans