Asml Netherlands B.v.

Jozef Ferdinand Dymphna Verbeeck

Heine Melle Mulder

Wilfred Edward Endendijk

Patricius Aloysius Jacobus Tinnemans

Paul Van Der Veen

Marius Ravensbergen

Bert Claessens

Willem Jan Bouman

Bert Pieter Van Drieënhuizen

Marc Hendricus Margaretha Dassen

Thijs Johan Henry Hollink

An illumination system having an array of individually controllable optical elements is disclosed, wherein each element is moveable between a plurality of orientations which may be selected in order to form desired illumination modes. The illumination system includes a controller to control orientation of one or more of the elements, the controller configured to apply force to the one or more elements which at least partially compensates for force applied to the one or more elements by a burst of radiation incident upon the one or more elements.

Illumination system and lithographic apparatus

A method of controlling an element of an array of individually controllable elements. The method includes varying a frequency of a driving voltage with which the element is driven.

Array element device control method and apparatus

Growing community of inventors

Belgium, Belgium

Jozef Ferdinand Dymphna Verbeeck