Texas Instruments Corporation

Joyce Wong Holton

Jwei Wien Liu

Edward Carl Fisher

Roger A Robbins

Jack C Smith

An anchor to hold getter materials in place within a micromechanical device package substrate. First and second cavity faces define an anchor cavity and mechanically retain a getter away from a region holding the micromechanical device. The getter anchor may be formed in a substrate comprised of at least three layers. The layers form a cavity in the substrate with a wide bottom portion&#x2014;formed in the middle layer and a relatively narrower top portion&#x2014;formed by the top layer. The narrow portion helps to retain the getter in the cavity by creating a mechanical lock on the wide portion of getter in the bottom of the cavity.

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Plano, TX, United States of America

Joyce Wong Holton