Pixtronix, Incorporated

Qualcomm Incorporated

Joyce H Wu

Jasper Lodewyk Steyn

Mark B Andersson

Timothy J Brosnihan

Eugene E Fike, Iii

Richard S Payne

Cait Ni Chleirigh

Roger W Barton

Jignesh Gandhi

Nesbitt W Hagood

John Fijol

Jianru Shi

Tsutomu Kobayashi

Gianni Taraschi

Aleksander Franz

Tyler Adam Dunn

Susan Oakley

Nikhil Jayant Joshi

J Lodewyk Steyn

This disclosure provides systems, methods and apparatus for an electromechanical systems (EMS) assembly. The EMS assembly includes a substrate, an anchor disposed on the substrate, and a suspended planar body supported over the substrate by the anchor. The suspended planar body includes at least one depression extending out of a plane of the suspended planar body and protruding towards the substrate. The suspended planar body also includes a substantially horizontal portion corresponding to a gap in the at least one depression. An extent of the gap is up to 20% of a length of the suspended planar body.

Electromechanical system structures with ribs having gaps

This disclosure provides systems, methods and apparatus for actuating an electromechanical systems (EMS)-based light modulator. An actuator for an EMS-based light modulator can be formed from the combination of a drive electrode, an anchored shutter electrode, and a suspended shutter electrode. A parallel plate portion of the drive electrode along with the suspended shutter electrode form a parallel plate portion of the actuator. A zipper portion of the drive electrode and the anchored shutter electrode form a zipper portion of the actuator.

Display apparatus actuators including anchored and suspended shutter electrodes

A display apparatus includes a first substrate, a plurality of microelectromechanical systems (MEMS) light modulators formed from a structural material coupled to the first substrate and a second substrate separated from the first substrate. A plurality of spacers extend from the first substrate to keep the second substrate a minimum distance away from the plurality of light modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer and a layer of the structural material encapsulating the second polymer layer. The spacers can be used as fluid barriers and configured to surround more than one but less than all of the MEMS light modulators in the display apparatus.

MEMS anchor and spacer structure

A display apparatus includes a plurality of electromechanical systems (EMS) devices disposed on a first surface defined by a face of a substrate. Each EMS device includes a component which is movable in a plane that is substantially parallel to the first surface. The apparatus also includes a second surface positioned proximate to the substrate such that the plurality of EMS devices are located between the first surface and the second surface. In addition, each EMS device includes at least one anti-stiction projection positioned between the movable component and the second surface.

Display apparatus with stiction reduction features

This disclosure provides systems, methods and apparatus for a multi-state shutter assembly. The multi-state shutter assembly can be used in an electronic display. The shutter assembly can include a movable light obstructing component. The shutter assembly also can include first and second actuators configured to move the light obstructing component between three states, including a fully light obstructive state, a substantially transmissive state, and a partially transmissive state. At least one of the three states is a neutral state in which both the first and second actuators are in an unactuated state. The shutter assembly also can include a controller configured to control the first and second actuator to selectively move the light obstructing component into each of the three states.

Multi-state shutter assembly for use in an electronic display

This disclosure provides systems, methods and apparatus for incorporating tip-gap adjustment features (TGAF) in actuators of shutter assemblies. The TGAF are incorporated into a drive beam of the actuator during the formation of the shutter assembly over a mold. The TGAF are configured such that they develop a mechanical stress or stress gradient. When the shutter assembly is released from the mold, the stress or stress gradient in the TGAF bend the drive beam such that a tip-gap between the drive beam and a load beam of the actuator is reduced. The reduced tip-gap, in turn, reduces an actuation voltage needed to actuate the shutter assembly.

Display apparatus with narrow gap electrostatic actuators

This disclosure provides systems, methods and apparatus for providing multiple dielectric coatings for a shutter assembly. The multiple dielectric coatings include an outer dielectric coating and one or more inner dielectric coatings. The outer dielectric coating has an electrical trap density that is lower than electrical trap densities of the one or more inner dielectric coatings. The lower electrical trap density reduces the amount of charge buildup over various surfaces of the shutter assembly. This reduction in charge buildup also reduces electrostatic forces that may cause incorrect operation of the shutter assembly.

Display device incorporating multiple dielectric layers

The invention relates to a light modulator including a substrate having a surface and a modulation assembly coupled to the substrate that includes a modulation element and a first compliant beam. The first compliant beam includes a first segment that extend away from a first anchor and a second segment that extends back towards the first anchor. The length of the first segment is different than the length of the second segment.

Mechanical light modulators with stressed beams

The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.

MEMS anchors

A display apparatus includes a backlight and an aperture layer that is positioned in front of the backlight and defines a plurality of apertures. The display apparatus also includes a microelectromechanical system (MEMS) light modulator configured to modulate light emitted by the backlight passing through the apertures to form an image on the display apparatus. The MEMS light modulator includes a shutter that has a light blocking portion having an aperture layer-facing surface and a front-facing surface and at least one depression formed in the light blocking portion. The width of the at least one depression accounts for at least 50% but less than 100% of a distance separating two edges of the shutter.

Microelectromechanical device and method of manufacturing

Systems, apparatuses and methods are provided for increasing the aperture ratio of a display by increasing the total travel distance of respective light modulating bodies in a display while maintaining fast switching speeds. Increasing the total travel distance allows for a larger aperture ratio in a display, which provides greater power savings and increased display brightness. The total travel distance of a light modulating body includes the distance the body travels from an open position to a closed position, and vice-versa. In one example, the travel distance of a light modulating body (e.g., any of the light modulators as described above) is asymmetric: from a neutral position, the body travels a greater distance in a first direction than in a second direction.

Asymmetric travel for MEMS light modulator

This methods and devices described herein relate to displays and methods of manufacturing cold seal fluid-filled displays, including MEMS. The fluid substantially surrounds the moving components of the MEMS display to reduce the effects of stiction and to improve the optical and electromechanical performance of the display. The invention relates to a method for sealing a MEMS display at a lower temperature such that a vapor bubble does not form only at temperatures about 15&#xb0; C. to about 20&#xb0; C. below the seal temperature. In some embodiments, the MEMS display apparatus includes a first substrate, a second substrate separated from the first substrate by a gap and supporting an array of light modulators, a fluid substantially filling the gap, a plurality of spacers within the gap, and a sealing material joining the first substrate to the second substrate.

Methods for manufacturing cold seal fluid-filled display apparatus

The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.

This methods and devices described herein relate to displays and methods of manufacturing cold seal fluid-filled displays, including MEMS. The fluid substantially surrounds the moving components of the MEMS display to reduce the effects of stiction and to improve the optical and electromechanical performance of the display. The invention relates to a method for sealing a MEMS display at a lower temperature such that a vapor bubble does not formforms only at temperatures about 15&#xb0; C. to about 20&#xb0; C. below the seal temperature. In some embodiments, the MEMS display apparatus includes a first substrate, a second substrate separated from the first substrate by a gap and supporting an array of light modulators, a fluid substantially filling the gap, a plurality of spacers within the gap, and a sealing material joining the first substrate to the second substrate.

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Somerville, MA, United States of America

Joyce H Wu