Radom Corporation

Igc-medical Advances, Inc.

Tokyo Electron Limited

Koninklijke Philips Corporation N.v.

Invivo Corporation

Jovan Jevtic

Ashok Menon

Velibor Pikelja

Derek Seeber

Andrej Mitrovic

Eric J Strang

Richard Parsons

Murray D Sirkis

Bill H Quon

John Koller

Cory Barthel

William T Johnson, Jr

Kenshin Ushiroda

Nunez Tatum

Steven M Zwolinski

Matthew J Mercier

Matthias Gyori

Sam Antley

Ian McKinney

A high-powered microwave torch provides a tunable cavity to move between a first and second mode for ignition and steady-state operation. The tuning may be accomplished by adjusting end plates of a cylindrical cavity consistent with a desired TE01δ resonant mode. A swirl promoting spacer system allows cantilevered coaxial tubes to accommodate gas flow rates, and a junction between the tube assembly and a plasma nozzle provides a compression engagement resistant to temperature-expansion induced stress.

High-power plasma torch with ignition detuning

A plasma torch employs a dielectric resonator excited at separate locations with phase shifted signals to provide more uniform current flow through the resonator. High-power operation is possible while protecting the dielectric by using a combination segregated spiral flow and linear flow cooling air at different rates. Microwave leakage from the plasma resonant chamber is contained by conductive metal chokes.

High-power plasma torch with dielectric resonator

A portable, modular plasma source allows the production of an emission spectrometer by combination with a common portable fiber optic spectrograph by channeling emitted light through a fiber optic coupling communicating light from the plasma source to the portable fiber optic spectrograph.

Portable plasma source for optical spectroscopy

A dielectric resonator is excited at its natural resonant frequency to produce a highly uniform electric field for the generation of plasma. The plasma may be used as a desolvator, atomizer excitation source and ionization source in an optical spectrometer or a mass spectrometer.

Microwave plasma spectrometer using dielectric resonator

A plasma unit for a mass spectroscopy machine generates plasma using a microwave coupled dielectric ring held within a microwave cavity employing part of the mass spectrometer structure to define the microwave cavity, thereby permitting improved proximity of the plasma and plasma ionized sample material to the mass spectrometer aperture.

Plasma generator assembly for mass spectroscopy

A dielectric resonator is excited at its natural resonant frequency to produce a highly uniform electric field for the generation of plasma. The plasma may be used in a optical or mass spectrometer.

Plasma generator using dielectric resonator

A dielectric resonator is excited at its natural resonant frequency to produce highly uniform electric field for the generation of plasma. The plasma may be used optical or mass spectrometer.

A compact and versatile power meter is created through the use of a discrete component network providing for phased splitting and combining of signals obtained at taps along a transmission conduit having a predefined phase separation. The use of the discrete component network eliminates the need for bulky waveguides or microstrip antenna designs, the latter providing phase shift through their physical dimensions.

Compact radiofrequency power meter

A high-density plasma source () is disclosed. The source includes an annular insulating body () with an annular cavity () formed within. An inductor coil () serving as an antenna is arranged within the annular cavity and is operable to generate a first magnetic field within a plasma duct () interior region () and inductively couple to the plasma when the annular body is arranged to surround a portion of the plasma duct. A grounded conductive housing () surrounds the annular insulating body. An electrostatic shield () is arranged adjacent the inner surface of the insulating body and is grounded to the conductive housing. Upper and lower magnet rings (and) are preferably arranged adjacent the upper and lower surfaces of the annular insulating body outside of the conductive housing. A T-match network is in electrical communication with said inductor coil and is adapted to provide for efficient transfer of RF power from an RF power source to the plasma. At least one plasma source can be used to form a high-density plasma suitable for plasma processing of a workpiece residing in a plasma chamber in communication with the at least one source.

Inductively coupled high-density plasma source

An implementation of an optical transmission path for NMR signals from local coils in magnetic resonance imaging employs a photomodulator that may be incorporated into a connecting optical cable to be shared among multiple local coils and to provide for connection and disconnection at an electrical interface eliminating the need for optical connectors.

Optical interface for local MRI coils

A coil for magnetic resonance imaging operates in a transmit mode with multiple loops locked together in a phase relationship like a birdcage coil to provide a uniform transmission field, but in a receive mode like a phased array coil, each coil operating independently to produce a separate signal for reception by the MRI machine. Phasing of the coil during transmit mode is provided by a ring resonator controllably coupled to the loops. Controllable coupling is provided by a series of current limiting elements interposed between the resonant ring and the loops of the coil.

Phased array MRI coil with controllable coupled ring resonator

An apparatus and method of improving impedance matching between a RF signal and a multi-segmented electrode in a plasma reactor powered by the RF signal. The apparatus and method phase shifts the RF signal driving one or more electrode segment of the multi-segmented electrode, amplifies the RF signal, and matches an impedance of the RF signal with an impedance of the electrode segment, where the RF signal is modulated prior to matching of the impedance of the RF signal. The apparatus and method directionally couples an output of the matching of the impedance of the RF signal and the electrode segment, and adjusts the output of the matching of the impedance of the RF signal such that a directionally coupled output signal and a reference signal representing the RF signal at the output of the master RF oscillator produces a demodulated signal of minimal amplitude.

Apparatus and method of improving impedance matching between an RF signal and a multi- segmented electrode

A capacitor decoupling network allows the production of a multi-loop local coil for magnetic resonance imaging without overlap of the loops and/or with decoupling between both adjacent and non-adjacent coils. The former design may find application for new MRI techniques such as SMASH and SENSE.

Phased array local coil for MRI imaging having non-overlapping regions of sensitivity

A method for controlling the non-uniformities of plasma-processed semiconductor wafers by supplying the plasma with two electrical signals: a primary electrical signal that is used to excite the plasma, and a supplemental electrical signal. The supplemental signal may be composed of a plurality of electrical signals, each with a frequency harmonic to that of the primary signal. The phase of the supplemental signal is controlled with respect to the phase of the primary signal. By adjusting the parameters of the supplemental signal with respect to the primary signal, the user can control the parameters of the resultant plasma and, therefore, control the non-uniformities induced in the semiconductor wafer.

Growing community of inventors

West Allis, WI, United States of America

Jovan Jevtic