Samsung Electronics Co., Ltd.

Sungkyunkwan University

Joungwoo Han

Seungjun Lee

Woosung Choi

Taehyun Kim

Kimoon Lee

Ji Man Kim

Sungmin Jang

Haeyong Choi

Hyeonji Moon

Jong San Chang

Junho Chung

Wonsu Lee

Jin Seo Park

Seongyun Ryu

Seongkeun Kang

Kyeongmin Baek

Zhengyang Li

Byungku Yoo

An integrated waste gas treatment system includes an adsorption/desorption device that receives a waste gas that includes an organic compound and an organic nitrogen compound exhausted from a semiconductor manufacturing facility, where the adsorption/desorption device adsorbs the organic compound and the organic nitrogen compound and concentrates and desorbs the organic compound and the organic nitrogen compound, and a catalytic decomposition device disposed adjacent to the adsorption/desorption device, where the catalytic decomposition device includes a catalytic chamber that provides a gas passage through which a gas desorbed from the adsorption/desorption device flows and an oxidation-reduction catalyst disposed in the gas passage that removes the organic compound and the organic nitrogen compound from the desorbed gas. The organic compound and the organic nitrogen compound are subjected to an oxidation treatment by the oxidation-reduction catalyst, and nitrogen oxides generated by the oxidation treatment are removed by a selective reduction reaction.

Catalytic decomposition device and integrated waste gas treatment system

A gas treatment system includes a first scrubber, a regenerative catalytic oxidizer (RCO) that treats gas that passes through the first scrubber, a second scrubber that treats the gas that passed through the regenerative catalytic oxidizer, and a dielectric barrier discharge (DBD) plasma reactor that treats the gas that passed through the second scrubber. The regenerative catalytic oxidizer includes a two-bed regenerative catalytic reactor.

Gas treatment system and gas treatment method using the same

Provided is a method of treating an exhaust gas including preparing a rotor provided with a zeolite-carbon composite therein, providing a mixed gas including an organic gas and an alkali gas in the rotor, adsorbing the organic gas and the alkali gas to the zeolite-carbon composite, and desorbing the organic gas and the alkali gas from the zeolite-carbon composite, and the zeolite-carbon composite includes a zeolite and a carbon layer on the zeolite.

Method of manufacturing zeolite-carbon composite and method of treating exhaust gas

Growing community of inventors

Suwon-Si, South Korea

Joungwoo Han