Fundacion Tekniker

Josu Goikoetxea Larrinaga

A magnetic guide is presented that controls an electric arc between an anode and a cathode, which may be a target, over the whole cathode surface. The magnetic guide may be included in an arc evaporator and may include a first magnetic system having a group of permanent magnets located on the periphery of the evaporator or target, so that magnetization is perpendicular to the surface of the target. The magnetic guide may also include a second magnetic system that includes an electromagnet located at the rear of the target housed in an electrically insulating body at a distance from the target, with at least one of its magnetic poles parallel to the surface of the target, so that the combined action of the two magnetic systems provides uniform use or consumption of the target.

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Bizkaia, Spain

Josu Goikoetxea Larrinaga